公开(公告)号：US20240011855A1

公开(公告)日：2024-01-11

申请号：US18247159

申请日：2021-09-28

申请人： UNIVERSITY OF LIMERICK ,  TECHNOLOGICAL UNIVERSITY DUBLIN

发明人： Gabriel LEEN ,  Fintan MCGUINNESS ,  Muhammad Mahmood ALI ,  Elfed LEWIS ,  Mohamed OUBAHA

IPC分类号： G01L9/00

CPC分类号： G01L9/0042 ,  G01L9/0079

摘要： The present invention relates to a diaphragm for a pressure sensor, the diaphragm comprising a hybrid sol-gel film. The invention also extends to a process for the manufacture of said diaphragm for a pressure sensor and to a pressure sensor comprising said diaphragm.

公开(公告)号：US20180136055A1

公开(公告)日：2018-05-17

申请号：US15574448

申请日：2016-05-21

申请人： UNIVERSITY OF LIMERICK

发明人： Sven POEGGEL ,  Dinesh Babu DURAIBABU ,  Gabriel LEEN ,  Gerard DOOLY ,  Elfed LEWIS

IPC分类号： G01K11/32 ,  G01K5/58 ,  G01K5/32

CPC分类号： G01K11/3206 ,  G01K5/32 ,  G01K5/58

摘要： A temperature sensor (1) has a pressure sensor (10), the distal end of which is inserted in a sealed chamber (2) filled with a liquid. The pressure sensor has a light guide (4), a cavity (14) at a distal end of the light guide, a diaphragm (11) forming a wall of the cavity and being configured to deflect with applied pressure, and a detector to detect changes in light reflection due to deflection of the diaphragm. The liquid (3) which changes volume in response to temperature changes and this volume change is sufficient to change the pressure applied on the diaphragm (11), and the a interrogation system processes pressure data and/or light reflection data to generate an output indicating temperature of the fluid in the chamber.