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公开(公告)号：US11635315B2
公开(公告)日：2023-04-25
申请号：US17245645
申请日：2021-04-30
Inventor： Jeremiah C Williams , Hengky Chandrahalim
Abstract: A passive microscopic flow sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fiber. The three-dimensional microscopic optical structure includes a post attached off-center to and extending longitudinally from the cleaved tip of the optical fiber. A rotor of the three-dimensional microscopic optical structure is received for rotation on the post. The rotor has more than one blade. Each blade has a reflective undersurface that reflects a light signal back through the optical fiber when center aligned with the optical fiber, the blades of the rotor shaped to rotate at a rate related to a flow rate.
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公开(公告)号：US11287575B2
公开(公告)日：2022-03-29
申请号：US17236028
申请日：2021-04-21
Inventor： Jeremiah C Williams , Hengky Chandrahalim
Abstract: A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.
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