公开(公告)号：US11287575B2

公开(公告)日：2022-03-29

申请号：US17236028

申请日：2021-04-21

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Jeremiah C Williams ,  Hengky Chandrahalim

IPC: G02B6/02 ,  G02B6/293 ,  G02B6/12 ,  G01L7/06

Abstract: A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.

公开(公告)号：US11204468B2

公开(公告)日：2021-12-21

申请号：US17136552

申请日：2020-12-29

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Hengky Chandrahalim ,  Jonathan Smith

IPC: G01J3/02 ,  G01J3/26 ,  G02B6/293 ,  G01N21/27 ,  G02B6/02 ,  G02B6/12 ,  G01N21/09 ,  G01N21/85 ,  B82Y20/00 ,  B82Y15/00 ,  G02B6/36

Abstract: A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.

公开(公告)号：US11320596B2

公开(公告)日：2022-05-03

申请号：US17237128

申请日：2021-04-22

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Jeremiah Williams ,  Hengky Chandrahalim

IPC: G02B6/293 ,  G02B6/35 ,  G02B6/02 ,  G02B6/12

Abstract: A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back through the optical fiber.

公开(公告)号：US11635315B2

公开(公告)日：2023-04-25

申请号：US17245645

申请日：2021-04-30

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Jeremiah C Williams ,  Hengky Chandrahalim

IPC: G01F1/10 ,  G01L11/02 ,  G01F1/115

Abstract: A passive microscopic flow sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fiber. The three-dimensional microscopic optical structure includes a post attached off-center to and extending longitudinally from the cleaved tip of the optical fiber. A rotor of the three-dimensional microscopic optical structure is received for rotation on the post. The rotor has more than one blade. Each blade has a reflective undersurface that reflects a light signal back through the optical fiber when center aligned with the optical fiber, the blades of the rotor shaped to rotate at a rate related to a flow rate.

公开(公告)号：US20210294039A1

公开(公告)日：2021-09-23

申请号：US17236028

申请日：2021-04-21

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Jeremiah Q. Williams ,  Hengky Chandrahalim

IPC: G02B6/293

Abstract: A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a reflective layer on a mirror surface of the hinged optical layer. The method includes positioning the pivotally hinged optical layer to a closed position with the suspended structure, aligning the mirror surface with the cleaved tip of the optical fiber.

公开(公告)号：US20210149116A1

公开(公告)日：2021-05-20

申请号：US17136564

申请日：2020-12-29

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Hengky Chandrahalim ,  Jonathan Smith

IPC: G02B6/293

Abstract: A method of making passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes forming a three-dimensional microscopic optical structure on a cleaved tip of an optical fiber that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.

公开(公告)号：US11156782B2

公开(公告)日：2021-10-26

申请号：US17136564

申请日：2020-12-29

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Hengky Chandrahalim ,  Jonathan Smith

IPC: B82Y15/00 ,  G01J3/02 ,  G01J3/26 ,  G01N21/09 ,  G01N21/27 ,  G01N21/85 ,  G02B6/02 ,  G02B6/293 ,  G02B6/36 ,  G02B6/12 ,  B82Y20/00

Abstract: A method of making passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes forming a three-dimensional microscopic optical structure on a cleaved tip of an optical fiber that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.

公开(公告)号：US20210271027A1

公开(公告)日：2021-09-02

申请号：US17237128

申请日：2021-04-22

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Jeremiah Williams ,  Hengky Chandrahalim

IPC: G02B6/293

Abstract: A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back through the optical fiber.

公开(公告)号：US20210116644A1

公开(公告)日：2021-04-22

申请号：US17136552

申请日：2020-12-29

Applicant: US Gov't as represented by Secretary of Air Force

Inventor： Hengky Chandrahalim ,  Jonathan Smith

IPC: G02B6/293

Abstract: A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.