Hinged temperature-immune self-referencing fabry-pérot cavity sensors

    公开(公告)号:US11320596B2

    公开(公告)日:2022-05-03

    申请号:US17237128

    申请日:2021-04-22

    Abstract: A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back through the optical fiber.

    OPTICAL FIBER TIP MICRO ANEMOMETER

    公开(公告)号:US20210341320A1

    公开(公告)日:2021-11-04

    申请号:US17245645

    申请日:2021-04-30

    Abstract: A passive microscopic flow sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fiber. The three-dimensional microscopic optical structure includes a post attached off-center to and extending longitudinally from the cleaved tip of the optical fiber. A rotor of the three-dimensional microscopic optical structure is received for rotation on the post. The rotor has more than one blade. Each blade has a reflective undersurface that reflects a light signal back through the optical fiber when center aligned with the optical fiber, the blades of the rotor shaped to rotate at a rate related to a flow rate.

    Hinged temperature-immune self-referencing Fabry-Pérot cavity sensors

    公开(公告)号:US20210271027A1

    公开(公告)日:2021-09-02

    申请号:US17237128

    申请日:2021-04-22

    Abstract: A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back through the optical fiber.

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