公开(公告)号：US09825243B2

公开(公告)日：2017-11-21

申请号：US14825890

申请日：2015-08-13

Applicant: Universal Display Corporation

Inventor： Ruiqing Ma ,  Zhaoqun Zhou ,  Kamala Rajan

IPC: H01L51/00 ,  H01L51/52

CPC classification number: H01L51/0097 ,  H01L51/0023 ,  H01L51/5206 ,  H01L51/5221 ,  H01L51/5275 ,  H01L2251/5353 ,  Y02E10/549

Abstract: Described herein are devices and methods related to fabrication of organic electroluminescent devices and related components. In certain embodiments, devices and methods for fabricating OLED panels on substrates with non-uniform reflection or un-even surfaces require that the non-uniform features are arranged in a way such that they are not presented in the region where photolithography features are needed. In certain embodiments, where precision processing such as photolithography features are needed, the substrate is designed to be flat.

公开(公告)号：US20160049617A1

公开(公告)日：2016-02-18

申请号：US14825890

申请日：2015-08-13

Applicant: Universal Display Corporation

Inventor： Ruiqing Ma ,  Zhaoqun Zhou ,  Kamala Rajan

IPC: H01L51/56 ,  H01L51/00 ,  H01L51/52

CPC classification number: H01L51/0097 ,  H01L51/0023 ,  H01L51/5206 ,  H01L51/5221 ,  H01L51/5275 ,  H01L2251/5353 ,  Y02E10/549

Abstract: Described herein are devices and methods related to fabrication of organic electroluminescent devices and related components. In certain embodiments, devices and methods for fabricating OLED panels on substrates with non-uniform reflection or un-even surfaces require that the non-uniform features are arranged in a way such that they are not presented in the region where photolithography features are needed. In certain embodiments, where precision processing such as photolithography features are needed, the substrate is designed to be flat.

Abstract translation: 这里描述的是与有机电致发光器件和相关部件的制造有关的装置和方法。 在某些实施例中，用于在具有不均匀反射或非平衡表面的衬底上制造OLED面板的装置和方法要求非均匀特征被布置成使得它们不呈现在需要光刻特征的区域中。 在某些实施例中，在需要诸如光刻特征的精密加工的情况下，将基板设计成平坦的。