公开(公告)号：US20180142349A1

公开(公告)日：2018-05-24

申请号：US15576215

申请日：2016-05-20

Applicant: Universität ULM

Inventor： Anton Reiser ,  Manfred Madel ,  Florian Huber ,  Klaus Thonke

IPC: C23C16/40

CPC classification number: C23C16/407 ,  C30B25/00 ,  C30B29/16

Abstract: A method for depositing zinc oxide on a substrate is disclosed. In an embodiment, the method includes reducing, in a first stage, a source material comprising zinc oxide to zinc which is gaseous at reaction conditions by contacting the source material with a gaseous reducing agent, transporting, in a second stage locally separate from the first stage, the gaseous zinc to the substrate, wherein the gaseous zinc is converted to zinc oxide by adding an oxidizing agent; and depositing the zinc oxide on a surface of the substrate, wherein the gaseous reducing agent is methane or a thermal decomposition product of at least one precursor, which is thermally decomposed at the reaction conditions of the first stage so that methane, methyl radicals and/or acetone is released.