公开(公告)号：US20210029816A1

公开(公告)日：2021-01-28

申请号：US16935200

申请日：2020-07-22

Applicant: University of Electronic Science and Technology of China

Inventor： Wenjie FU ,  Chaoyang ZHANG ,  Cong NIE ,  Xiaoyun LI ,  Yang YAN

IPC: H05H1/46

Abstract: A compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source includes an outer coaxial line, and an inner coaxial line arranged inside the outer coaxial line. The outer coaxial line includes a tube body. A metal tube is arranged in the tube body. A short-circuit plunger is arranged at the bottom of the metal tube. The inner coaxial line includes a needle electrode, and the needle electrode is arranged in the metal tube. A first gas inlet is arranged on the tube body, and the first gas inlet is connected between the tube body and the metal tube. A second gas inlet is arranged at the bottom of the metal tube, and the second gas inlet is connected between the metal tube and the needle electrode. The tube body is further provided with a microwave input port, and the microwave input port is connected to the metal tube.