公开(公告)号：US20240410961A1

公开(公告)日：2024-12-12

申请号：US18527347

申请日：2023-12-03

Applicant: University of Electronic Science and Technology of China

Inventor： Hua FAN ,  Huichao YUE ,  Yiming HU ,  Guo LI ,  Jing LUO ,  Panfeng ZHAO ,  Quanyuan FENG

IPC: G01R33/02 ,  G01R33/07

Abstract: Disclosed is a three-axis Hall angle sensor with an accuracy of 0.3°. The sensor is mainly designed by means of finite element software and COMSOL Multiphysics. The present specification will be mainly performed in three steps. In the first step, a cross-shape horizontal Hall element for measuring the magnetic field in the vertical direction, that is, the direction z, is studied. The second section mainly studies a three-contact four-Hall vertical element for measuring the magnetic field in the directions x, y. The third part is to design the angle sensor. Compared with the horizontal Hall element, the vertical Hall element has a relatively large offset, therefore, four vertical Hall elements are used to measure the magnetic field in the horizontal direction, and two complementary vertical structures are used to eliminate the error when the magnetic field in the same horizontal direction is measured.