公开(公告)号：US11958739B2

公开(公告)日：2024-04-16

申请号：US17188985

申请日：2021-03-01

Applicant: University of Rhode Island Board of Trustees

Inventor： Jason Rodger Dwyer ,  Y. M. Nuwan D. Y. Bandara ,  Brian Sheetz

IPC: B81C1/00

CPC classification number: B81C1/00547 ,  B81C1/00071 ,  B81C2201/0133 ,  B81C2201/0145

Abstract: The present invention provides a simple method for ablating a protective thin film on a bulk surface and roughening the underlying bulk. In an embodiment, silicon nitride thin films, which are useful as etch-stop masks in micro- and nano-fabrication, is removed from a silicon wafer's surface using a hand-held “flameless” Tesla-coil lighter. Vias created by a spatially localized electron beam from the lighter allow a practitioner to perform micro- and nano-fabrication without the conventional steps of needing a photoresist and photolithography. Patterning could be achieved with a hard mask or rastering of the spatially confined discharge, offering—with low barriers to rapid use—particular capabilities that might otherwise be out of reach to researchers without access to conventional, instrumentation-intensive micro- and nano-fabrication workflows.

公开(公告)号：US11981557B2

公开(公告)日：2024-05-14

申请号：US17232624

申请日：2021-04-16

Applicant: Southern Methodist University ,  University of Rhode Island Board of Trustees

Inventor： Y. M. Nuwan D. Y. Bandara ,  Buddini I. Karawdeniya ,  Jugal Saharia ,  Min Jun Kim ,  Jason Rodger Dwyer

IPC: B81B1/00 ,  B82Y15/00 ,  B82Y40/00 ,  C25F3/02 ,  G01N27/12 ,  G01N33/487

CPC classification number: B81B1/002 ,  B82Y40/00 ,  C25F3/02 ,  G01N27/127 ,  G01N33/48721 ,  B01J2219/00864 ,  B82Y15/00

Abstract: The present invention includes one or more nanopores in a SixNy membrane comprising a monoprotic surface termination, methods of making, and methods of using the one or more nanopores, where the one or more nanopores are a chemically-tuned controlled dielectric breakdown (CT-CDB) nanopore membrane, wherein the CT-CDB allows for long-term stability of measurements in the presence of only electrolyte (open pore current stability) and ability to support many molecular detection events. In addition, the CT-CBD has pore that unclog spontaneously, in response to voltage cessation or application, or both.

公开(公告)号：US20210325329A1

公开(公告)日：2021-10-21

申请号：US17232624

申请日：2021-04-16

Applicant: Southern Methodist University ,  University of Rhode Island Board of Trustees

Inventor： Y.M. Nuwan D.Y. Bandara ,  Buddini I. Karawdeniya ,  Jugal Saharia ,  Min Jun Kim ,  Jason Rodger Dwyer

IPC: G01N27/12

Abstract: The present invention includes one or more nanopores in a SixNy membrane comprising a monoprotic surface termination, methods of making, and methods of using the one or more nanopores, where the one or more nanopores are a chemically-tuned controlled dielectric breakdown (CT-CDB) nanopore membrane, wherein the CT-CDB allows for long-term stability of measurements in the presence of only electrolyte (open pore current stability) and ability to support many molecular detection events. In addition, the CT-CBD has pore that unclog spontaneously, in response to voltage cessation or application, or both.