公开(公告)号：US20240332045A1

公开(公告)日：2024-10-03

申请号：US18622319

申请日：2024-03-29

Applicant: Ushio Denki Kabushiki Kaisha

Inventor： Kazumasa YOSHIOKA ,  Shinji TANIGUCHI

IPC: H01L21/67 ,  H01L33/00

CPC classification number: H01L21/67115 ,  H01L33/0095

Abstract: Provided is an optical heating apparatus that allows high flexibility in setting an in-plane heating condition for a processing target substrate. The optical heating apparatus includes: a chamber; a supporter to support the processing target substrate; a light source unit including a plurality of heating groups being configured to emit light; and a controller to control electricity supplied to each of the plurality of the heating groups. One of the processing target substrate and the light source unit is configured to rotate relative to an other on a rotation axis. The plurality of the heating groups each include a plurality of light sources, and a nth and (n+1)th circular rotation loci partially overlap each other. The nth and (n+1)th circular rotation loci are drawn by virtual rotation of the light emission region of each light source belonging to a nth and (n+1)th heating group around the rotation axis.

公开(公告)号：US20180217052A1

公开(公告)日：2018-08-02

申请号：US15933053

申请日：2018-03-22

Applicant: Ushio Denki Kabushiki Kaisha

Inventor： Shinji TANIGUCHI ,  Kyosuke YAMANE ,  Kenichi SABATAKE ,  Naoki GOTO

IPC: G01N21/31 ,  G01N21/01 ,  B01L9/06

Abstract: An object is the provision of an optical measuring device that can be carried readily due to its reduced size and that can suppress the incidence of light other than detection light upon a light receiving unit and thus can obtain a measurement result with high accuracy. The optical measuring device includes a first light guiding path forming body having therein a first light guiding path formed by a through hole extending linearly for allowing measurement light from a light source to be incident on a measuring position in which a measurement sample is disposed, and a second light guiding path forming body having therein a second light guiding path formed by a through hole extending linearly for guiding detection light having exited from the measuring position to a light receiving unit. In the measuring position, the measurement light is incident and the detection light is exited through a sample bracket having a sample tube receiving hole into which the s sample tube loaded with the measurement sample is inserted. The second light guiding path forming body is formed from a light-absorbing material. Whole of the second light guiding path is formed surrounded by an inner wall surface of the through hole in the second light guiding path forming body. A relational expression (1) described below is satisfied when d represents a diameter of the second light guiding path of the second light guiding path forming body and L represents a length of the second light guiding path of the second light guiding path forming body. 3≤L/d≤15.   Relational expression (1):

公开(公告)号：US20220260421A1

公开(公告)日：2022-08-18

申请号：US17665167

申请日：2022-02-04

Applicant: Ushio Denki Kabushiki Kaisha

Inventor： Takahiro INOUE ,  Shinji TANIGUCHI ,  Takafumi MIZOJIRI

IPC: G01J5/00

Abstract: A temperature measurement method comprises a step (A) of lighting a light source part to irradiate a substrate to be treated that is an object to be heated with light for heating, the light source part including a plurality of semiconductor light-emitting elements that emits light having a main emission wavelength range of 0.3 μm or more and less than 0.5 μm; a step (B) of turning off the light source part after the step (A); a step (C) of maintaining an unlit state of the light source part after the step (B); and a step (D) of measuring, during the step (C), a temperature of the substrate to be treated through observation of light emitted from the substrate to be treated using a thermometer having a sensitivity wavelength range different from the main emission wavelength range of light emitted from the light source part.

公开(公告)号：US20210335593A1

公开(公告)日：2021-10-28

申请号：US17312589

申请日：2019-12-05

Applicant: Ushio Denki Kabushiki Kaisha

Inventor： Shinji TANIGUCHI ,  Hideaki YAGYU ,  Manabu MORI

IPC: H01J65/00 ,  H01J61/04 ,  H01J61/16 ,  A61L2/10

Abstract: A ultraviolet irradiation apparatus includes: a first electrode block and a second electrode block located apart from each other in a first direction or located in an electrically-insulated state in the first direction; a recessed groove formed on a side surface of each of both the blocks; a first discharge lamp partially fitted into the recessed grooves formed in both the blocks and located across the both blocks; a power supply part for supplying electrical power to the first discharge lamp; a first current-carrying member electrically connecting the first electrode block and the power supply part; a second current-carrying member capable of electrically connecting the second electrode block and the power supply part at an electrical potential different from that of the first current-carrying member; and a light irradiation window for extracting ultraviolet light emitted from the first discharge lamp to outside.