公开(公告)号：US12139804B2

公开(公告)日：2024-11-12

申请号：US17472075

申请日：2021-09-10

Applicant: Utica Leaseco, LLC

Inventor： Nabil A. Khater ,  Kuanping Gong ,  Chaowei Wang ,  Daniel Mark Dobkin

IPC: C25B9/30 ,  C23C16/448 ,  C25B1/01 ,  C25B11/034 ,  C25B11/061 ,  C25B11/075 ,  C25B15/08

Abstract: A system and method for generating arsine are disclosed. The system may include a shell having a top interior surface. The system may also include a cathode-anode assembly positioned in the shell and forming an elongated structure substantially parallel to the top surface. The cathode-anode assembly may include a first electrode and a second electrode surrounding the first electrode and forming a gap therebetween. The second electrode may include a plurality of channels along a length of the second electrode. The plurality of channels may allow circulation of electrolyte within and around at least a portion of the cathode-anode assembly and allow gases generated in response to current applied to the cathode-anode assembly to escape from the cathode-anode assembly. Such gases may be used as precursor gases for a high-volume metal-organic chemical vapor deposition (MOCVD) operation.