公开(公告)号：US20220099593A1

公开(公告)日：2022-03-31

申请号：US17484924

申请日：2021-09-24

申请人： Utica Leaseco, LLC

发明人： Sean SWEETNAM ,  Octavi Santiago Escala SEMONIN ,  Vineet KUMAR ,  Gang HE ,  Melissa ARCHER

IPC分类号： G01N21/95 ,  G06T7/00

摘要： Aspects of the present disclosure include methods, apparatuses, and computer readable media for transmitting a light such that is incident on a semiconductor device, detecting a first reflected light from a first layer of the semiconductor device and a second reflected light from a second layer of the semiconductor device, identifying a defect in the first layer based on the first reflected light and the second reflected light, wherein the defect provides a shunt path between a top electrode to be deposited on the first layer and the second layer, and performing a defect reduction procedure on the semiconductor device to compensate for the defect in response to identifying the defect.