METHODS AND SYSTEMS FOR REDUCING DEFECTS

    公开(公告)号:US20220099593A1

    公开(公告)日:2022-03-31

    申请号:US17484924

    申请日:2021-09-24

    IPC分类号: G01N21/95 G06T7/00

    摘要: Aspects of the present disclosure include methods, apparatuses, and computer readable media for transmitting a light such that is incident on a semiconductor device, detecting a first reflected light from a first layer of the semiconductor device and a second reflected light from a second layer of the semiconductor device, identifying a defect in the first layer based on the first reflected light and the second reflected light, wherein the defect provides a shunt path between a top electrode to be deposited on the first layer and the second layer, and performing a defect reduction procedure on the semiconductor device to compensate for the defect in response to identifying the defect.