公开(公告)号：US20250137950A1

公开(公告)日：2025-05-01

申请号：US18930019

申请日：2024-10-29

Applicant: VG Systems Limited

Inventor： Paul Mack ,  Timothy Sion Nunney ,  Dhilan Sukunan Devadasan

IPC: G01N23/2273 ,  G01N31/00

Abstract: In accordance with the claimed invention, there is provided an apparatus for changing an oxidation state of a surface to be analysed of a sample, the apparatus comprising: a vacuum chamber; a sample holder inside the vacuum chamber, configured to hold a sample having a surface to be analysed; an inlet inside the vacuum chamber, configured to provide a localised supply, to the surface to be analysed, of an agent for changing an oxidation state of the surface to be analysed; and an energy source, configured to provide energy to the agent to facilitate changing the oxidation state of the surface to be analysed. There is also provided a process for changing an oxidation state of a surface to be analysed of a sample and a process for performing X-ray photoelectron spectroscopy, XPS, of a surface to be analysed of a sample.