公开(公告)号：US20230350116A1

公开(公告)日：2023-11-02

申请号：US18349404

申请日：2023-07-10

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Tim GUSTAFSON ,  Jeffrey James KUNA ,  Markus BILGER ,  Richard A. BRADLEY, Jr.

IPC: G02B5/28 ,  H01L27/146 ,  G02B1/10

CPC classification number: G02B5/285 ,  G02B5/281 ,  G02B5/283 ,  H01L27/14621 ,  H01L27/14685 ,  G02B1/10

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.