专利检索 ap:("VIENEX CORPORATION") AND inv:"Yoshihiro KAGAWA" 第 1 页

1.

发明公开
FOREIGN SUBSTANCE/DEFECT INSPECTION DEVICE, IMAGE GENERATION DEVICE IN FOREIGN SUBSTANCE/DEFECT INSPECTION, AND FOREIGN SUBSTANCE/DEFECT INSPECTION METHOD 审中-公开

公开(公告)号：US20230314334A1

公开(公告)日：2023-10-05

申请号：US18011521

申请日：2021-06-15

申请人： VIENEX CORPORATION

发明人： Osamu IWASAKI , Yoshihiro KAGAWA

IPC分类号： G01N21/88 , H04N25/701 , H04N23/56 , G01N21/94

CPC分类号： G01N21/8806 , H04N25/701 , G01N2201/0826 , G01N21/94 , G01N2201/0633 , H04N23/56

摘要： One pixel unit including at least one light receiving element of a light receiving element array (photodiode array) and a light source have a one-to-one correspondence, and only when the light source emits light, the light beam is detected by at least one light receiving element (one pixel unit) corresponding to the light source. An illumination optical system includes a light guiding means for guiding to an inspection object by reducing an interval between optical axes of light beams emitted from a plurality of light sources in an arrangement direction of a plurality of the light sources.