公开(公告)号：US20180102266A1

公开(公告)日：2018-04-12

申请号：US15290237

申请日：2016-10-11

申请人： Veeco Instruments Inc.

发明人： Ian Kunsch ,  Brett Stuart Snowden ,  Gregory Williams ,  David Gant ,  Aaron Frazier

IPC分类号： H01L21/67 ,  F16J15/02

CPC分类号： H01L21/67126 ,  F16J15/022 ,  F16J15/025 ,  H01L21/6719

摘要： A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.

公开(公告)号：USD803283S1

公开(公告)日：2017-11-21

申请号：US29564740

申请日：2016-05-16

申请人： Veeco Instruments, Inc.

设计人： Yuliy Rashkovsky ,  Brett Stuart Snowden ,  Miguel Angel Saldana

公开(公告)号：US10269595B2

公开(公告)日：2019-04-23

申请号：US15290237

申请日：2016-10-11

申请人： Veeco Instruments Inc.

发明人： Ian Kunsch ,  Brett Stuart Snowden ,  Gregory Williams ,  David Gant ,  Aaron Frazier

IPC分类号： F16J15/10 ,  H01L21/67 ,  F16J15/02

摘要： A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.

公开(公告)号：US20170256436A1

公开(公告)日：2017-09-07

申请号：US15057530

申请日：2016-03-01

申请人： Veeco Instruments, Inc.

发明人： Yuliy Rashkovsky ,  Brett Stuart Snowden ,  Miguel Angel Saldana

IPC分类号： H01L21/687 ,  B25J15/00 ,  B25J11/00 ,  H01L21/683

CPC分类号： H01L21/68742 ,  B25J11/0095 ,  B25J15/0042 ,  B25J15/0616 ,  B25J15/10 ,  H01L21/6838 ,  H01L21/68728 ,  H01L21/68785

摘要： A wafer handing assembly comprising a center hub supporting a vertical non-contact lifting head and at least one radially extending and radially retracting wafer engaging mechanism having a surface to engage a wafer at a peripheral edge of the wafer, where the peripheral edge is a corner edge or a side edge. In some implementations, the wafer engaging mechanism has a foot on which the wafer edge is supported.

公开(公告)号：US20170256434A1

公开(公告)日：2017-09-07

申请号：US15377230

申请日：2016-12-13

申请人： Veeco Instruments, Inc.

发明人： Yuliy Rashkovsky ,  Brett Stuart Snowden ,  Miguel Angel Saldana

IPC分类号： H01L21/687

CPC分类号： H01L21/68735 ,  H01L21/6838 ,  H01L21/68728 ,  H01L21/68742 ,  H01L21/68785

摘要： A wafer handling assembly comprising a center hub supporting a vertical non-contact lifting head and at least one radially extending and radially retracting wafer engaging mechanism having a surface to engage a wafer at a peripheral edge of the wafer, where the peripheral edge is a corner edge or a side edge. In some implementations, the wafer engaging mechanism has a foot on which the wafer edge is supported. The lifting head may be vertically moveable in respect to the assembly.