公开(公告)号：US20190316258A1

公开(公告)日：2019-10-17

申请号：US16383321

申请日：2019-04-12

Applicant: Veeco Instruments Inc.

Inventor： Bojan Mitrovic ,  Ian Kunsch ,  Juan Gamarra ,  Mandar Deshpande

IPC: C23C16/54 ,  C23C16/455

Abstract: An injector block for supplying one or more reactant gases into a chemical vapor deposition reactor. The injector block including a plurality of first reactant gas distribution channels between one or more first reactant gas inlets and a plurality of first reactant gas distribution outlets to deliver a first reactant gas into the reactor, and a plurality of second reactant gas distribution channels between one or more second reactant gas inlets and a plurality of second reactant gas distribution outlets to deliver a second reactant gas into the reactor, the plurality of second reactant gas distribution outlets partitioned into at least a second reactant gas first zone and a second reactant gas second zone, the second reactant gas second zone at least partially surrounding the second reactant gas first zone.