公开(公告)号：US4461239A

公开(公告)日：1984-07-24

申请号：US403417

申请日：1982-07-30

申请人： Vincent D. Cannella ,  Prem Nath ,  Robert J. Shuman

发明人： Vincent D. Cannella ,  Prem Nath ,  Robert J. Shuman

IPC分类号： H01L31/04 ,  H01J37/32 ,  H01L21/205 ,  H05H1/46 ,  C23C13/10

CPC分类号： H01J37/32082 ,  H01J37/32568 ,  H01J37/32651 ,  H01J37/3277 ,  H05H1/46 ,  H01J2237/3325

摘要： A reduced capacitance electrode assembly for use in an alternating current plasma system provides reduced input capacitance to an associated tuning network. The assembly includes an electrode adapted to receive alternating current power for maintaining a plasma region and a plurality of electrically conductive plates. The plates are closely spaced apart by less than a predetermined distance on one side of the electrode for precluding the formation of a plasma region on the one side of the electrode and for providing a plurality of series capacitances to present a substantially reduced capacitance to the alternating current power.The reduced capacitance electrode assembly is particularly useful in a system for making photovoltaic devices wherein a plurality of amorphous semiconductor materials is deposited onto a continuous conductive substrate moving through a corresponding plurality of deposition chambers. At least one of the chambers includes a reduced capacitance electrode assembly comprising an electrode spaced from the substrate adapted to receive alternating current power for establishing a plasma between the electrode and the substrate, and a plurality of electrically conductive plates being closely spaced apart on the side of the electrode opposite the substrate for confining the plasma between the electrode and the substrate and for providing a plurality of series coupled capacitances to present a substantially reduced capacitance to the alternating current power.

摘要翻译： 用于交流等离子体系统的减小电容电极组件为相关联的调谐网络提供降低的输入电容。 组件包括适于接收用于维持等离子体区域和多个导电板的交流电力的电极。 这些板在电极的一侧上紧密地间隔小于预定距离，以阻止在电极的一侧上形成等离子体区域，并提供多个串联电容，以向交替的电流呈现基本上减小的电容 当前的权力。 减小电容电极组件在用于制造光伏器件的系统中特别有用，其中多个非晶半导体材料沉积到移动通过相应的多个沉积室的连续导电衬底上。 所述腔室中的至少一个包括减小电容电极组件，其包括与所述衬底间隔开的电极，所述电极适于接收用于在所述电极和所述衬底之间建立等离子体的交流电力，以及在所述电极和所述衬底之间紧密间隔开的多个导电板 所述电极与所述衬底相对，用于将所述等离子体限制在所述电极和所述衬底之间，并且用于提供多个串联耦合电容以向所述交流电力呈现基本上减小的电容。