公开(公告)号：US20160214864A1

公开(公告)日：2016-07-28

申请号：US15023567

申请日：2014-08-27

Applicant: WACKER CHEMIE AG

Inventor： Barbara MUELLER ,  Walter HAECKL ,  Wolfgang STOIBER

IPC: C01B33/035

CPC classification number: C01B33/035

Abstract: Installation of a shield around a Siemens reactor prior to harvesting polysilicon rods produced therein allows the upper, bell jar-like shell to be removed for cleaning, while protecting the polysilicon rods from contamination and increasing safety of nearby personnel. The polysilicon rods are harvested while the shield is present.

Abstract translation: 在收获其中生产的多晶硅棒之前，在西门子反应堆周围安装屏蔽罩可以将上部的钟形瓶状壳体移除以进行清洁，同时保护多晶硅棒免受污染并增加附近人员的安全。 当存在屏蔽时收获多晶硅棒。

公开(公告)号：US20150364323A1

公开(公告)日：2015-12-17

申请号：US14761523

申请日：2014-01-13

Applicant: WACKER CHEMIE AG

Inventor： Barbara MUELLER ,  Thomas KOCH

IPC: H01L21/02 ,  C01B33/035

CPC classification number: H01L21/02595 ,  C01B33/035 ,  H01L21/02532 ,  H01L21/0262

Abstract: The Siemens process for deposition of polycrystalline silicon in the form of rods in a sealed reactor is improved by, after introduction of deposition gas has ceased, introducing a ventilating gas into the partially sealed reactor, withdrawing a gas stream from the reactor, and monitoring the components in the gas stream withdrawn until a desired concentration of one or more components is reached, and opening the reactor to remove the rods.

Abstract translation: 西门子在密封反应器中以多晶硅形式沉积多晶硅的方法通过在引入沉积气体已经停止之后，将通风气体引入部分密封的反应器中，从反应器中排出气流，并监测 取出气流中的组分直到达到一种或多种组分的所需浓度，并打开反应器以除去棒。