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    Process for preparing polycrystalline silicon
    2.
    发明授权
    Process for preparing polycrystalline silicon 有权

    公开(公告)号：US11440803B2

    公开(公告)日：2022-09-13

    申请号：US16469628

    申请日：2016-12-14

    申请人： WACKER CHEMIE AG

    发明人： Harald Hertlein ,  Dirk Weckesser

    IPC分类号： C01B33/03

    摘要： The invention relates to a method for producing polycrystalline silicon granulate in a fluidized bed reactor. The method comprises a fluidization of silicon seed particles by means of a fluidizing gas in a fluidized bed, which is heated by a heating device, wherein elemental silicon is deposited by pyrolysis on the silicon seed particles by the addition of a reaction gas containing hydrogen and silane and/or halosilane to form the polycrystalline silicon granulate. In a continuous process, waste gas is discharged from the fluidized bed reactor and hydrogen recovered from said waste to gas is again supplied to the fluidized bed reactor as a circulating gas. The circulating gas has a nitrogen content of less than 1000 ppmv. The invention further relates to polycrystalline silicon granulate having a nitrogen content of less than 2 ppba.

    Process for operating a fluidized bed reactor
    4.
    发明授权
    Process for operating a fluidized bed reactor 有权

    公开(公告)号：US10526206B2

    公开(公告)日：2020-01-07

    申请号：US14899143

    申请日：2014-06-17

    申请人： Wacker Chemie AG

    发明人： Dirk Weckesser

    IPC分类号： C01B33/107 ,  C01B33/03

    摘要： Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.

    Reactor and process for preparing granular polysilicon
    5.
    发明授权
    Reactor and process for preparing granular polysilicon 有权

    公开(公告)号：US10258951B2

    公开(公告)日：2019-04-16

    申请号：US15126921

    申请日：2015-03-12

    申请人： Wacker Chemie AG

    发明人： Dirk Weckesser

    IPC分类号： C01B33/027 ,  B01J8/18 ,  B01J8/42

    摘要： A reactor for preparing granular polysilicon by deposition of polycrystalline silicon on silicon seed particles has a reaction vessel, an inner reactor tube for a fluidized bed comprising granular polysilicon and a reactor bottom within the reactor vessel, a heating device for heating the fluidized bed in the inner reactor tube, at least one bottom gas nozzle for introduction of fluidizing gas and at least one reaction gas nozzle for introduction of reaction gas, a feed device to introduce silicon seed particles, an offtake line for granular polysilicon, and a device for discharging reactor offgas from the reactor vessel, and has a cylindrical component which has openings on its cylindrical surface, with at least 5% and not more than 95% of the cylindrical surface being open located between the inner reactor tube and the heating device.