公开(公告)号：US20230286809A1

公开(公告)日：2023-09-14

申请号：US18016155

申请日：2020-07-17

Applicant: WACKER CHEMIE AG

Inventor： Michael GOTTANKA ,  Harald HERTLEIN ,  Benedikt KOENINGER

IPC: C01B33/03 ,  B01J8/18

CPC classification number: C01B33/03 ,  B01J8/1827 ,  B01J8/1836 ,  B01J8/1809 ,  B01J2208/00061 ,  B01J2208/00548 ,  B01J2208/00663 ,  B01J2208/00725

Abstract: Silicon granulate is produced in a fluidized bed reactor having a fluidized bed region fluidized by a gas flow and heated by a heating apparatus. Seed particles and a feed gas including hydrogen and silane and/or halosilane is continuously supplied, and elemental silicon is deposited on the seed particles to form the silicon granulate, which is discharged as a continuous product stream from the reactor. The fluidized bed temperature affects the quality and formation of the product stream, which may be determined as the temperature of an offgas stream from the fluidized bend region. The temperature, as a responding variable may be determined and controlled by means of the mass and energy balance of a defined scheme.