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公开(公告)号:US20210164124A1
公开(公告)日:2021-06-03
申请号:US17263631
申请日:2018-07-27
Applicant: WACKER CHEMIE AG
Inventor: Heinz KRAUS , Piotr FILAR
Abstract: Electrode assemblies useful, inter alia, for mounting thin rods in Siemens reactors for manufacture of polysilicon, have a base segment which receives a holder segment, and an insert, interfacial surface(s) of which have depressions and/or elevations which reduce contact surface area, allowing the holder, base segment, insert, and optional intermediate segments to be constructed of materials having different thermal conductivities.