AFM PROBE WITH VARIABLE STIFFNESS
    2.
    发明申请
    AFM PROBE WITH VARIABLE STIFFNESS 有权
    具有可变刚度的AFM探头

    公开(公告)号:US20080190182A1

    公开(公告)日:2008-08-14

    申请号:US11962037

    申请日:2007-12-20

    IPC分类号: G12B21/08

    摘要: Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.

    摘要翻译: 公开了一种用于AFM的原子力显微镜(AFM)探针,更具体地说,涉及一种适用于测试尺寸在数量级或微米级的微结构的形貌和机械性能的AFM探针。 为此,根据本发明的AFM探针包括一个可弹性变形的框架,其具有固定端和一个轴上的可动端; 由所述可动端支撑的AFM尖端能够沿着所述轴线的方向抵靠测试样品移动; 以及设置在所述框架的内表面上的止动件,以控制所述AFM尖端在预定范围内的移动。