公开(公告)号：US3584847A

公开(公告)日：1971-06-15

申请号：US3584847D

申请日：1968-05-31

Applicant: WESTERN ELECTRIC CO

Inventor： TRIBBLE CHARLES S HAMMOND JR J ,  TRIBBLE ROBERT M ,  JOHNSON PAUL M JR

IPC: C23C14/56 ,  F27B9/02 ,  F27B9/24

CPC classification number: C23C14/56 ,  Y10S414/137 ,  Y10S414/139

Abstract: An apparatus for depositing a thin film of tantalum to workpieces includes a sputtering chamber and entrance and exit chambers located at opposite ends of and communicating with the sputtering chamber. Sealing devices are provided for isolating the sputtering chamber from the entrance and exit chambers. A reciprocating conveyor having a central conveyor section located within the sputtering chamber, and first and second conveyor sections, located in the entrance and exit chambers, respectively, and which sections may all be connected together, is provided for advancing workpieces from a first magazine in the entrance chamber, through the sputtering chamber, to a second magazine in the exit chamber.

公开(公告)号：US3295661A

公开(公告)日：1967-01-03

申请号：US45820365

申请日：1965-05-24

Applicant: WESTERN ELECTRIC CO

Inventor： MITCHELL JR HENRY D ,  TRIBBLE ROBERT M ,  WELLS HUGH A

IPC: H05K13/02

CPC classification number: H05K13/022

公开(公告)号：US3282669A

公开(公告)日：1966-11-01

申请号：US30544163

申请日：1963-08-29

Applicant: WESTERN ELECTRIC CO

Inventor： PINKHAM ROBERT M ,  TRIBBLE ROBERT M

IPC: C03C27/02 ,  C03C27/00 ,  C03C27/12 ,  H01J5/20 ,  H01J5/26 ,  H01L23/08 ,  H05B3/00

CPC classification number: H01J5/20 ,  C03C27/00 ,  H01J5/26 ,  H01J2893/0037 ,  H01J2893/0043 ,  H05B3/0057