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公开(公告)号：US3494852A
公开(公告)日：1970-02-10
申请号：US3494852D
申请日：1966-03-14
Applicant: WHITTAKER CORP
Inventor： DOCTOROFF MICHAEL
CPC classification number: H01L21/67011 , C23C14/325 , H01J27/10 , H01J37/3178 , Y10S422/906
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