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公开(公告)号:US20220149085A1
公开(公告)日:2022-05-12
申请号:US16954253
申请日:2019-12-30
Inventor: Juncheng Xiao , Fei Ai , Guoheng Yin , Yong Xu
IPC: H01L27/12
Abstract: The present invention provides a TFT array substrate, a manufacturing method thereof, and a display panel thereof, wherein the thin-film transistor (TFT) array substrate is defined with a first area and a second area, and includes a substrate layer, wherein a first TFT is disposed on the substrate layer in the first area, and a second TFT is disposed on the substrate layer in the second area; and wherein the first TFT is a top-gate TFT, the second TFT is a bottom-gate TFT, and a material used for a source/drain layer of the first TFT is same as a material used for a gate layer of the second TFT. The present invention provides a TFT array substrate, which adopts a novel film structure design, so that a low temperature poly-silicon (LTPS) TFT and Oxide TFT provided thereon can have great compatibility in the design and manufacturing process.
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公开(公告)号:US11315958B2
公开(公告)日:2022-04-26
申请号:US16605417
申请日:2019-09-18
Inventor: Fei Ai , Dewei Song , Guoheng Yin
IPC: H01L27/12 , H01L29/786 , H01L29/66 , G02F1/1368
Abstract: An array substrate and a method of manufacturing the same are provided. The array substrate includes a substrate, a plurality of thin film transistors disposed on the substrate, and a planarization layer covering the plurality of thin film transistors and filled a region defined by the plurality of thin film transistors and the substrate.
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