公开(公告)号：US08861133B1

公开(公告)日：2014-10-14

申请号：US13894240

申请日：2013-05-14

申请人： Western Digital (Fremont), LLC

发明人： Weimin Si ,  Yunfei Li ,  Ying Hong

IPC分类号： G11B5/187 ,  G11B5/127

CPC分类号： G11B5/1272 ,  G11B5/1278 ,  G11B5/1878 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A method and system for fabricating magnetic transducer are described. The method and system include providing a main pole having a bottom and a top wider than the bottom. The method and system further include performing a high energy ion mill at an angle from a normal to the top of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method and system also include performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.

摘要翻译： 描述了用于制造磁换能器的方法和系统。 该方法和系统包括提供具有底部和顶部比底部更宽的主极。 所述方法和系统还包括以与主极顶部法线和第一能量成一角度地执行高能离子磨。 高能离子磨机去除主极顶部的一部分并暴露主极的顶部斜面。 该方法和系统还包括在第二能量下执行低能量离子磨，并从顶部斜面观察到扫掠角。 扫视角度不超过十五度。 第二能量小于第一能量。 该方法和系统还包括沉积非磁性间隙。

公开(公告)号：US08711518B1

公开(公告)日：2014-04-29

申请号：US13628793

申请日：2012-09-27

申请人： Western Digital (Fremont), LLC

发明人： Wanxue Zeng ,  Weimin Si ,  Ying Hong

IPC分类号： G11B5/127

CPC分类号： C25D7/001 ,  C25D5/022 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

摘要： Systems and methods for fabricating a microelectric device are provided herein. Various embodiments provide for systems and methods for fabricating a magnetic recording pole using plasma-enhanced chemical vapor deposition (PECVD) when depositing seed material. For some embodiments, fabrication of the magnetic recording pole may comprise using plasma-enhanced chemical vapor deposition (PECVD) Ru as an adhesion layer for a plating seed layer.

摘要翻译： 本文提供了用于制造微电子器件的系统和方法。 各种实施例提供了当沉积种子材料时使用等离子体增强化学气相沉积（PECVD）制造磁记录极的系统和方法。 对于一些实施例，磁记录极的制造可以包括使用等离子体增强化学气相沉积（PECVD）Ru作为电镀种子层的粘附层。

公开(公告)号：US09940950B2

公开(公告)日：2018-04-10

申请号：US15145205

申请日：2016-05-03

申请人： Western Digital (Fremont), LLC

发明人： Wanxue Zeng ,  Weimin Si ,  Ying Hong ,  Lieping Zhong

IPC分类号： G11B5/127 ,  G11B5/187 ,  G11B5/31

CPC分类号： G11B5/1272 ,  G11B5/1278 ,  G11B5/187 ,  G11B5/3116 ,  G11B5/3163

摘要： Various embodiments described herein provide for substrate structures including uniform plating seed layers, and that provide favorable adhesion on dielectric substrate layers. According to some embodiments, a methods for forming a magnetic recording pole is provided comprising: forming an insulator layer; forming a trench in the insulator layer; forming an amorphous seed layer over the insulator layer; forming an adhesion layer over the amorphous seed layer, the adhesion layer comprising a physical vapor deposited (PVD) noble metal; forming a plating seed layer over the adhesion layer, the plating seed layer comprising chemical vapor deposited (CVD) Ru; and forming a magnetic material layer over the plating seed layer.

公开(公告)号：US09520146B1

公开(公告)日：2016-12-13

申请号：US13972002

申请日：2013-08-21

申请人： Western Digital (Fremont), LLC

发明人： Jinwen Wang ,  Weimin Si ,  Jianxin Fang ,  Ying Hong ,  Hongzhou Jiang ,  Ching-Huang Lu ,  Yan Chen ,  Donghong Li ,  Lien-Chang Wang ,  Lieping Zhong ,  Tao Pan

IPC分类号： G11B5/127 ,  H04R31/00 ,  G11B5/11 ,  G11B5/31

CPC分类号： G11B5/112 ,  G11B5/1276 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3153 ,  G11B5/3163 ,  H04R31/00 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.

摘要翻译： 公开了一种形成缠绕的屏蔽垂直磁记录写入极的方法。 提供了包括引导屏蔽层和设置在引导屏蔽层之上的中间层的结构，所述中间层包括极材料和电介质材料。 在电介质材料中形成沟槽。 通过离子束蚀刻工艺去除沟槽中的非磁性层。 种子层沉积在沟槽中并在极材料上方。 包含侧屏蔽层的磁性材料沉积在籽晶层的至少一部分上。

公开(公告)号：US09082423B1

公开(公告)日：2015-07-14

申请号：US14223957

申请日：2014-03-24

申请人： Western Digital (Fremont), LLC

发明人： Feng Liu ,  Zhigang Bai ,  Weimin Si ,  Yugang Wang ,  Fenglin Liu ,  Tao Pan ,  Samuel W. Yuan

IPC分类号： G11B5/11

CPC分类号： G11B5/11 ,  G11B5/112 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic transducer has an ABS, a pole, coil(s) and a trailing shield. The pole includes a trailing surface having first and second portions. The first portion adjoins the ABS and is oriented at a first bevel angle from perpendicular to the ABS. The first bevel angle is nonzero and acute. The second portion adjoins the first portion, is recessed from the ABS and oriented at a second bevel angle from perpendicular to the ABS. The second bevel angle is less than the first bevel angle and nonzero. The trailing shield has a pole-facing surface part of which adjoins the ABS and is oriented at the first bevel angle. A write gap is between the trailing shield and the pole. The write gap has a constant thickness for the first portion of the trailing surface and a thickness that increases with increasing distance from the ABS for the second portion.

摘要翻译： 磁换能器具有ABS，杆，线圈和后挡板。 杆包括具有第一和第二部分的后表面。 第一部分邻接ABS并且以垂直于ABS的第一斜角定向。 第一个斜角是非零和锐角。 第二部分邻接第一部分，从ABS凹入并且以垂直于ABS的第二斜角定向。 第二个斜角小于第一个斜角和非零。 后挡板具有面向极板的表面部分，其邻接ABS并且以第一斜角定向。 尾部屏蔽和极之间的写入间隙。 写入间隙对于后表面的第一部分具有恒定的厚度，并且随着与用于第二部分的ABS的距离的增加而增加的厚度。