公开(公告)号：US20130305988A1

公开(公告)日：2013-11-21

申请号：US13475006

申请日：2012-05-18

申请人： William F. DiVergilio ,  William D. Lee ,  Mike Cristoforo ,  Walter Hrynyk ,  Robert L. Moffett ,  Tomoya Nakatsugawa

发明人： William F. DiVergilio ,  William D. Lee ,  Mike Cristoforo ,  Walter Hrynyk ,  Robert L. Moffett ,  Tomoya Nakatsugawa

IPC分类号： C23C16/50 ,  H05H1/46

CPC分类号： H01J37/32091 ,  H01J37/3211 ,  H01J37/32412

摘要： An ion source is disclosed that utilizes a capacitive discharge to produce ignition ions, which are subsequently used to ignite an inductively coupled plasma within a plasma chamber. In some embodiments, a capacitive discharge element is located along a gas feed line at a position that is upstream of a plasma chamber. The capacitive discharge element ignites a capacitive discharge within the gas feed line. The capacitive discharge contains ignition ions that are provided to a downstream plasma chamber. An inductively coupled plasma ignition element, in communication with the plasma chamber, ignites and sustains a high density inductively coupled plasma within the plasma chamber based upon ignition ions from the capacitive discharge. Due to the ignition ions, the inductively coupled plasma element can easily ignite the high density inductively coupled plasma, even at a low pressure.

摘要翻译： 公开了一种利用电容放电来产生点火离子的离子源，其随后用于点燃等离子体室内的感应耦合等离子体。 在一些实施例中，电容放电元件沿着位于等离子体室上游的位置处的气体馈送线定位。 电容放电元件点燃气体馈送线中的电容放电。 电容放电包含提供给下游等离子体室的点火离子。 基于来自电容放电的点火离子，与等离子体室连通的电感耦合等离子体点火元件在等离子体室内点燃和维持高密度感应耦合等离子体。 由于点火离子，即使在低压下，电感耦合等离子体元件也可以容易地点燃高密度电感耦合等离子体。