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公开(公告)号:US20060244386A1
公开(公告)日:2006-11-02
申请号:US11120153
申请日:2005-05-02
申请人: William Hooke , Allen Martin , Mark Ray , Gary McGuire
发明人: William Hooke , Allen Martin , Mark Ray , Gary McGuire
IPC分类号: H01J7/24
CPC分类号: H01J37/32348 , A61L2/0011 , A61L2/14 , A61L9/22 , H01J37/32009 , H05H1/46 , H05H2001/4682
摘要: A dielectric barrier plasma discharge device consistent with certain embodiments of the present invention has a pair of electrodes spaced apart by an electrode gap. A dielectric is disposed between the electrodes. The electrode gap is provided with a gas at a specified pressure. A rapid rise time voltage pulse generator produces a voltage pulse across the electrodes to cause an extreme overvoltage condition, wherein the rapid rise time is less than a plasma generation time so that the extreme overvoltage condition occurs prior to current flow across the electrode gap. Due to the high voltages and high current densities, the product yields an extremely high instantaneous power density. This extreme overvoltage condition is also believed to lead to production of shock waves and runaway free electrons. The resulting plasma can be utilized to carry out many potential tasks including, but not limited to etching, deposition, and sterilization. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
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公开(公告)号:US20080106206A1
公开(公告)日:2008-05-08
申请号:US11980034
申请日:2007-10-30
申请人: William Hooke , Allen Martin , Mark Ray
发明人: William Hooke , Allen Martin , Mark Ray
CPC分类号: H01J37/32348 , A61L2/0011 , A61L2/14 , A61L9/22 , H01J37/32009 , H05H1/46 , H05H2001/4682
摘要: A method of generating a fast-rise time voltage step to produce an overvoltage condition for a dielectric barrier plasma discharge involves providing a pair of electrodes spaced apart by an electrode gap and at least one dielectric disposed in the gap; generating fast-rise time voltage step such that the rise time to achieve said overvoltage condition is equal to or less than the time required to generate the plasma thereby establishing the overvoltage condition prior to current flow across said electrode gap. Power from storage capacitor banks discharge into the electrode gap through a switch. The switch is capable of standing-off voltage sufficient to create the overvoltage condition when the switch is open. The discharge current pulse across the said electrode gap is terminated by charging properties of the said dielectric(s) in the said electrode gap. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
摘要翻译: 产生快速上升时间电压阶跃以产生电介质阻挡等离子体放电的过电压条件的方法包括提供由电极间隙隔开的一对电极和设置在间隙中的至少一个电介质; 产生快速上升时间电压阶跃,使得实现所述过电压状态的上升时间等于或小于产生等离子体所需的时间,从而在电流流过电极间隙之前建立过电压状态。 存储电容器组的功率通过开关放电到电极间隙。 该开关能够在开关断开时足以产生过电压状态的隔离电压。 通过在所述电极间隙中的所述电介质的充电特性来终止跨所述电极间隙的放电电流脉冲。 该摘要不被认为是限制性的,因为其他实施例可能偏离本摘要中描述的特征。
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