公开(公告)号：US20120237878A1

公开(公告)日：2012-09-20

申请号：US13051884

申请日：2011-03-18

申请人： XIANZHONG ZENG ,  DUJIANG WAN ,  HONGPING YUAN ,  LING WANG ,  MIAO WANG ,  HAI SUN

发明人： XIANZHONG ZENG ,  DUJIANG WAN ,  HONGPING YUAN ,  LING WANG ,  MIAO WANG ,  HAI SUN

IPC分类号： G03F7/20

CPC分类号： G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A method for fabricating a magnetic transducer having a nonmagnetic intermediate layer is described. A pole is provided on the intermediate layer. The pole has sides, a bottom, a top wider than the bottom and a leading bevel proximate to an ABS location. A side gap is provided adjacent to at least the sides of the pole. A bottom antireflective coating (BARC) layer is provided on the intermediate layer. The BARC layer is removable using a wet etchant and is adjacent to at least a portion of the side gap. A mask layer is provided on the BARC layer. A pattern is photolithographically transferred into the mask layer, forming a shield mask. Part of the BARC layer is exposed to the wet etchant such that the sides of the pole and the side gap are free of the BARC layer. At least a magnetic side shield is provided.

摘要翻译： 描述了一种用于制造具有非磁性中间层的磁换能器的方法。 在中间层上设置极点。 极具有侧面，底部，比底部更宽的顶部和靠近ABS位置的前斜面。 在极的至少两侧附近提供侧面间隙。 在中间层上提供底部抗反射涂层（BARC）层。 BARC层可以使用湿蚀刻剂去除，并且与侧间隙的至少一部分相邻。 在BARC层上提供掩模层。 将图案光刻地转印到掩模层中，形成屏蔽掩模。 BARC层的一部分暴露于湿蚀刻剂，使得极和侧间隙的边不含BARC层。 至少提供一个磁性侧屏蔽。

公开(公告)号：US20100112486A1

公开(公告)日：2010-05-06

申请号：US12262572

申请日：2008-10-31

申请人： JINQIU ZHANG ,  HAI SUN ,  HONGPING YUAN ,  TSUNG YUAN CHEN ,  GUANXIONG LI

发明人： JINQIU ZHANG ,  HAI SUN ,  HONGPING YUAN ,  TSUNG YUAN CHEN ,  GUANXIONG LI

IPC分类号： G03F7/20

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask on the intermediate layer. The mask includes a line having at least one side. A hard mask layer is provided on the mask. At least a portion of the hard mask layer resides on the side(s) of the line. At least part of the hard mask layer on the side(s) of the line is removed. Thus, at least a portion of the line is exposed. The line is then removed, providing an aperture in the hard mask corresponding to the line. The method also includes forming a trench in the intermediate layer under the aperture. The trench top is wider than its bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供掩模。 掩模包括具有至少一个侧面的线。 在掩模上设置硬掩模层。 硬掩模层的至少一部分位于线的一侧。 除去线的侧面上的硬掩模层的至少一部分。 因此，线的至少一部分被暴露。 然后去除线，在对应于线的硬掩模中提供孔。 该方法还包括在孔下方的中间层中形成沟槽。 沟槽顶部比底部宽。 该方法还包括提供PMR极，其至少一部分位于沟槽中。