公开(公告)号：US20040145738A1

公开(公告)日：2004-07-29

申请号：US10672207

申请日：2003-09-26

Applicant: Xerox Corporation

Inventor： Decai Sun ,  Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran ,  Patrick Y. Maeda

IPC: G01J003/28

CPC classification number: G01J3/06 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/20

Abstract: A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.

Abstract translation: 具有旋转圆柱反射衍射光栅的可调谐微机电（MEMS）分光光度计与单片硅衬底上的Rowland圆上的光电检测器和光纤光源集成。