公开(公告)号：US20040123651A1

公开(公告)日：2004-07-01

申请号：US10717803

申请日：2003-11-19

Applicant: Xerox Corporation

Inventor： Thomas Hantschel ,  Eugene M. Chow ,  David K. Fork

IPC: G01N013/10 ,  G01B007/34

CPC classification number: G01Q70/10 ,  G01Q70/06 ,  G01Q70/16 ,  G01R1/06727 ,  Y10S977/873

Abstract: Scanning probe systems, which include scanning probe microscopes (SPMs), atomic force microscope (AFMs), or profilometers, are disclosed that use cantilevered spring (e.g., stressy metal) probes formed on transparent substrates. When released, a free end bends away from the substrate to form the cantilevered spring probe, which has an in-plane or out-of-plane tip at its free end. The spring probe is mounted in a scanning probe system and is used to scan or otherwise probe a substrate surface. The probes are used for topography, electrical, optical and thermal measurements.

Abstract translation: 公开了扫描探针系统，其包括扫描探针显微镜（SPM），原子力显微镜（AFM）或轮廓仪，其使用形成在透明基底上的悬臂弹簧（例如，应力金属）探针。 当释放时，自由端从基板弯曲以形成悬臂弹簧探针，其在其自由端具有平面内或平面外的尖端。 弹簧探针安装在扫描探针系统中，用于扫描或以其他方式探测衬底表面。 探头用于地形，电气，光学和热测量。

公开(公告)号：US20030182993A1

公开(公告)日：2003-10-02

申请号：US10112215

申请日：2002-03-29

Applicant: Xerox Corporation

Inventor： Thomas Hantschel ,  Eugene M. Chow ,  David K. Fork

IPC: G01N023/00

CPC classification number: G01Q70/10 ,  G01Q70/06 ,  G01Q70/16 ,  G01R1/06727 ,  Y10S977/873

Abstract: Scanning probe systems, which include scanning probe microscopes (SPMs), atomic force microscope (AFMs), or profilometers, are disclosed that use cantilevered spring (e.g., stressy metal) probes formed on transparent substrates. When released, a free end bends away from the substrate to form the cantilevered spring probe, which has an in-plane or out-of-plane tip at its free end. The spring probe is mounted in a scanning probe system and is used to scan or otherwise probe a substrate surface. A laser beam is directed through the transparent substrate onto the probe to measure tip movement during scanning or probing. Other detection schemes can also be used (e.g., interferometry, capacitive, piezoresistive). The probes are used for topography, electrical, optical and thermal measurements. The probes also allow an SPM to operate as a depth gauge.

公开(公告)号：US20030183761A1

公开(公告)日：2003-10-02

申请号：US10136258

申请日：2002-04-30

Applicant: Xerox Corporation

Inventor： Thomas Hantschel ,  Eugene M. Chow ,  David K. Fork ,  Michel A. Rosa ,  Dirk De Bruyker

IPC: G12B021/02

CPC classification number: G01Q70/10 ,  G01Q70/06 ,  G01Q70/16 ,  G01R1/06727 ,  Y10S977/873

Abstract: Scanning probe systems, which include scanning probe microscopes (SPMS) are disclosed that include cantilevered spring (e.g., stressy metal) probes and actuation/position sensing electrodes formed on a substrate. The actuation electrodes are used to position the spring probe relative to the substrate using electrostatic, magnetic, acoustic, or piezoelectric arrangements. An actuation signal source is switched between full on and off states to facilitate nullON/OFFnull probe actuation in which the spring probe is either fully retracted against the substrate or deployed for scan operations. The position sensing electrodes are used to sense the deflected position of the spring probe relative to the substrate using resistive, magnetic, or piezoresistive arrangements. Spring probe arrays are disclosed that include multiple spring probes arranged on a single substrate. Each spring probe of the array includes a separate actuation electrode that is controlled using nullON/OFFnull or tapping probe actuation, and may include a separate position sensing electrode.

Abstract translation: 公开了包括扫描探针显微镜（SPMS）的扫描探针系统，其包括形成在基底上的悬臂弹簧（例如，应力金属）探针和致动/位置感测电极。 致动电极用于使用静电，磁，声或压电布置相对于衬底定位弹簧探头。 致动信号源在完全打开和关闭状态之间切换，以便于“ON / OFF”探头致动，其中弹簧探针完全缩回到基板上或部署用于扫描操作。 位置检测电极用于使用电阻，磁阻或压阻布置来感测弹簧探针相对于基底的偏转位置。 公开了包括布置在单个基板上的多个弹簧探针的弹簧探针阵列。 阵列的每个弹簧探针包括使用“ON / OFF”或分接探头致动来控制的单独的致动电极，并且可以包括单独的位置感测电极。