公开(公告)号：US07262411B2

公开(公告)日：2007-08-28

申请号：US11295148

申请日：2005-12-06

申请人： Xuong Nguyen-Huu ,  Mark H. Ellisman ,  Stuart Kleinfelder

发明人： Xuong Nguyen-Huu ,  Mark H. Ellisman ,  Stuart Kleinfelder

IPC分类号： H01J37/22

CPC分类号： H01J37/244 ,  H01J37/224 ,  H01J37/26 ,  H01J2237/2441 ,  H01J2237/24455

摘要： A preferred method for transmission electron microscopy includes a step of generating a microscopy signal. The microscopy signal is then detected with an active pixel detector that includes a plurality of pixels. Each of the pixels includes at least one photodiode. Each pixel integrates an incident signal over a collection time period. Using a massively parallel on chip analog to digital conversion, very fast read out times can be achieved, e.g., many frames per second. In a preferred embodiment, the read out time permits there to be a single electron event recorded per pixel, indicating either a single electron or the lack thereof. This permits simple accumulation of the pixel counts for each pixel in read-out and storage electronics.

摘要翻译： 透射电子显微镜的优选方法包括产生显微镜信号的步骤。 然后用包括多个像素的有源像素检测器检测显微镜信号。 每个像素包括至少一个光电二极管。 每个像素在收集时间段内集成了一个入射信号。 使用大量并行片上模数转换，可以实现非常快的读出时间，例如每秒许多帧。 在优选实施例中，读出时间允许存在每像素记录的单个电子事件，指示单个电子或其缺乏。 这允许在读出和存储电子设备中的每个像素的像素计数的简单累积。

公开(公告)号：US20060169901A1

公开(公告)日：2006-08-03

申请号：US11295148

申请日：2005-12-06

申请人： Xuong Nguyen-Huu ,  Mark Ellisman ,  Stuart Kleinfelder

发明人： Xuong Nguyen-Huu ,  Mark Ellisman ,  Stuart Kleinfelder

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  H01J37/224 ,  H01J37/26 ,  H01J2237/2441 ,  H01J2237/24455

摘要： A preferred method for transmission electron microscopy includes a step of generating a microscopy signal. The microscopy signal is then detected with an active pixel detector that includes a plurality of pixels. Each of the pixels includes at least one photodiode. Each pixel integrates an incident signal over a collection time period. Using a massibel parallel on chip analog to digital conversion, very fast read out times can be achieved, e.g., many frames per second. In a preferred embodiment, the read out time permits there to be a single electron event recorded per pixel, indicating either a single electron or the lack thereof. This permits simple accumulation of the pixel counts for each pixel in read-out and storage electronics.

摘要翻译： 透射电子显微镜的优选方法包括产生显微镜信号的步骤。 然后用包括多个像素的有源像素检测器检测显微镜信号。 每个像素包括至少一个光电二极管。 每个像素在收集时间段内集成了一个入射信号。 使用并行片上模数转换的矩阵，可以实现非常快的读出时间，例如，每秒许多帧。 在优选实施例中，读出时间允许存在每像素记录的单个电子事件，指示单个电子或其缺乏。 这允许在读出和存储电子设备中的每个像素的像素计数的简单累积。

公开(公告)号：US07851764B2

公开(公告)日：2010-12-14

申请号：US12408586

申请日：2009-03-20

申请人： Liang Jin ,  Robert B. Bilhorn ,  Xuong Nguyen-Huu

发明人： Liang Jin ,  Robert B. Bilhorn ,  Xuong Nguyen-Huu

IPC分类号： G01T1/24

CPC分类号： H01J37/244 ,  H01J37/26 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24495 ,  H01L27/14659 ,  H04N5/32 ,  H04N5/3205

摘要： A method of high-energy particle imaging by individual particle counting with an active pixel direct bombardment detector. The method includes the step of providing an active pixel direct bombardment detector including an array of pixels. Each pixel is characterized by a reset time constant. The method further includes sampling the pixel voltage of each pixel at a first time. The method further includes applying a pixel reset voltage to each pixel for a reset time interval less than the reset time constant. The method further includes sampling the pixel voltage of each pixel at a second time. The method further includes computing a difference between the sampled pixel voltages at the first and second times. The sampling and the applying of the reset voltage may be periodic. A direct bombardment detector is also provided.

摘要翻译： 用有源像素直接轰击检测器通过单个粒子计数的高能粒子成像的方法。 该方法包括提供包括像素阵列的有源像素直接轰击检测器的步骤。 每个像素的特征在于复位时间常数。 该方法还包括在第一时间对每个像素的像素电压进行采样。 该方法还包括在小于复位时间常数的复位时间间隔中对每个像素应用像素复位电压。 该方法还包括在第二时间对每个像素的像素电压进行采样。 该方法还包括计算第一次和第二次采样的像素电压之间的差异。 复位电压的采样和施加可以是周期性的。 还提供直接轰击检测器。

公开(公告)号：US20100237252A1

公开(公告)日：2010-09-23

申请号：US12408586

申请日：2009-03-20

申请人： Liang Jin ,  Robert B. Bilhorn ,  Xuong Nguyen-Huu

发明人： Liang Jin ,  Robert B. Bilhorn ,  Xuong Nguyen-Huu

IPC分类号： G01T1/24

CPC分类号： H01J37/244 ,  H01J37/26 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24495 ,  H01L27/14659 ,  H04N5/32 ,  H04N5/3205

摘要： A method of high-energy particle imaging by individual particle counting with an active pixel direct bombardment detector. The method includes the step of providing an active pixel direct bombardment detector including an array of pixels. Each pixel is characterized by a reset time constant. The method further includes sampling the pixel voltage of each pixel at a first time. The method further includes applying a pixel reset voltage to each pixel for a reset time interval less than the reset time constant. The method further includes sampling the pixel voltage of each pixel at a second time. The method further includes computing a difference between the sampled pixel voltages at the first and second times. The sampling and the applying of the reset voltage may be periodic. A direct bombardment detector is also provided.

摘要翻译： 用有源像素直接轰击检测器通过单个粒子计数的高能粒子成像的方法。 该方法包括提供包括像素阵列的有源像素直接轰击检测器的步骤。 每个像素的特征在于复位时间常数。 该方法还包括在第一时间对每个像素的像素电压进行采样。 该方法还包括在小于复位时间常数的复位时间间隔中对每个像素应用像素复位电压。 该方法还包括在第二时间对每个像素的像素电压进行采样。 该方法还包括计算第一次和第二次采样的像素电压之间的差异。 复位电压的采样和施加可以是周期性的。 还提供直接轰击检测器。