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公开(公告)号：US20240222065A1
公开(公告)日：2024-07-04
申请号：US18556927
申请日：2021-06-04
Applicant: Hitachi High- Tech Corporation
Inventor： Yuta IMAI , Daisuke BIZEN , Junichi KATANE
CPC classification number: H01J37/224 , H01J37/28
Abstract: To provide a sample image observation device and a method that restore an image based on a sparsely sampled image and that can improve observation throughput and usability by maintaining a restored image quality constant regardless of a change in an observation condition. In a sample image observation device that irradiates a part of an observation area of the sample 19 with an electron beam and restores an image including a pixel not irradiated with the electron beam, the control system 22 includes a storage unit configured to store a correlation between an irradiation condition of irradiating the observation area of the sample with the electron beam and an observation condition of the sample, a control unit configured to synchronize an irradiation proportion of the electron beam with the observation condition based on the correlation, and an input unit configured to input sample information on the sample.
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公开(公告)号：US20240096588A1
公开(公告)日：2024-03-21
申请号：US18368310
申请日：2023-09-14
Applicant: JEOL Ltd.
Inventor： Kanako Noguchi
IPC: H01J37/22
CPC classification number: H01J37/228 , H01J37/224 , H01J2237/2802
Abstract: A laser beam illumination equipment has a laser beam generation section and a mirror unit. An image generation section has a camera and a camera controller. A laser beam illumination control section sets a pulse period of a laser beam to the same period as an exposure period of the camera. With this configuration, a state change of a specimen can be set uniform over exposure durations. A pulse train of the laser beam may be generated based on a synchronization signal which is output from the camera controller.
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公开(公告)号：US20160268119A1
公开(公告)日：2016-09-15
申请号：US15064954
申请日：2016-03-09
Applicant: JEOL Ltd.
Inventor： Yasuhide Nakagawa
CPC classification number: H01J49/48 , G01N23/2273 , H01J37/224 , H01J37/285 , H01J49/0004 , H01J49/44 , H01J2237/057 , H01J2237/24485
Abstract: An electron spectrometer includes: an energy analyzer section that energy-analyzes electrons emitted from a specimen; a micro-channel plate that amplifies the electrons analyzed by the energy analyzer section; a fluorescent screen that converts the electrons amplified by the micro-channel plate into light; a camera that photographs the fluorescent screen; and an effective range calculation section that calculates an effective range of the fluorescent screen within a camera image photographed by the camera, the effective range calculation section performing a process that acquires a plurality of the camera images photographed while causing the energy analyzer section to analyze the electrons with a different center energy, a process that converts the plurality of camera images respectively into a plurality of spectra, and a process that calculates the effective range of the fluorescent screen within the camera image based on the plurality of spectra.
Abstract translation: 电子光谱仪包括：能量分析器，其对能从样品发射的电子进行能量分析; 微通道板，其放大由能量分析器部分分析的电子; 将由微通道板放大的电子转换为光的荧光屏; 照相机荧光屏; 以及有效范围计算部，其计算由所述照相机拍摄的照相机图像内的荧光屏的有效范围，所述有效范围计算部执行在使所述能量分析部进行分析的同时取得拍摄的多个照相机图像的处理， 具有不同中心能量的电子，将多个相机图像分别转换成多个光谱的过程，以及基于多个光谱计算相机图像内的荧光屏的有效范围的处理。
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公开(公告)号：US09368322B2
公开(公告)日：2016-06-14
申请号：US14677086
申请日：2015-04-02
Applicant: EBARA CORPORATION
Inventor： Takehide Hayashi , Masahiro Hatakeyama , Shinji Yamaguchi , Masato Naka
CPC classification number: H01J37/28 , H01J37/185 , H01J37/222 , H01J37/224 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817
Abstract: An inspection apparatus includes beam generation means, a primary optical system, a secondary optical system and an image processing system. Irradiation energy of the beam is set in an energy region where mirror electrons are emitted from the inspection object as the secondary charged particles due to the beam irradiation. The secondary optical system includes a camera for detecting the secondary charged particles, a numerical aperture whose position is adjustable along an optical axis direction and a lens that forms an image of the secondary charged particles that have passed through the numerical aperture on an image surface of the camera. In the image processing system, the image is formed under an aperture imaging condition where the position of the numerical aperture is located on an object surface to acquire an image.
Abstract translation: 检查装置包括光束产生装置，主光学系统，二次光学系统和图像处理系统。 光束的照射能量被设定在能够从作为二次带电粒子的检查对象射出的电子束照射的能量区域。 二次光学系统包括用于检测二次带电粒子的相机，其位置沿着光轴方向可调节的数值孔径，以及形成已经通过数字孔径的图像上的次级带电粒子的图像的透镜， 相机。 在图像处理系统中，在数值孔径的位置位于物体表面上的孔径成像条件下形成图像以获取图像。
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公开(公告)号：US20150287570A1
公开(公告)日：2015-10-08
申请号：US14677086
申请日：2015-04-02
Applicant: EBARA CORPORATION
Inventor： Takehide HAYASHI , Masahiro HATAKEYAMA , Shinji YAMAGUCHI , Masato NAKA
CPC classification number: H01J37/28 , H01J37/185 , H01J37/222 , H01J37/224 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817
Abstract: An inspection apparatus includes beam generation means, a primary optical system, a secondary optical system and an image processing system. Irradiation energy of the beam is set in an energy region where mirror electrons are emitted from the inspection object as the secondary charged particles due to the beam irradiation. The secondary optical system includes a camera for detecting the secondary charged particles, a numerical aperture whose position is adjustable along an optical axis direction and a lens that forms an image of the secondary charged particles that have passed through the numerical aperture on an image surface of the camera. In the image processing system, the image is formed under an aperture imaging condition where the position of the numerical aperture is located on an object surface to acquire an image.
Abstract translation: 检查装置包括光束产生装置，主光学系统，二次光学系统和图像处理系统。 光束的照射能量被设定在能够从作为二次带电粒子的检查对象射出的电子束照射的能量区域。 二次光学系统包括用于检测二次带电粒子的相机，其位置沿着光轴方向可调节的数值孔径，以及形成已经通过数字孔径的图像上的次级带电粒子的图像的透镜， 相机。 在图像处理系统中，图像形成在孔径成像条件下，其中数值孔径的位置位于物体表面上以获取图像。
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Patent Agency Ranking
公开(公告)号：US20080173814A1
公开(公告)日：2008-07-24
申请号：US12068484
申请日：2008-02-07
Applicant: Kenji Watanabe , Hirosi Sobukawa , Nobuharu Noji , Tohru Satake , Shoji Yoshikawa , Tsutomu Karimata , Mamoru Nakasuji , Masahiro Hatakeyama , Takeshi Murakami , Yuichiro Yamazaki , Ichirota Nagahama , Takamitsu Nagai , Kazuyoshi Sugihara
Inventor： Kenji Watanabe , Hirosi Sobukawa , Nobuharu Noji , Tohru Satake , Shoji Yoshikawa , Tsutomu Karimata , Mamoru Nakasuji , Masahiro Hatakeyama , Takeshi Murakami , Yuichiro Yamazaki , Ichirota Nagahama , Takamitsu Nagai , Kazuyoshi Sugihara
CPC classification number: H01J37/28 , H01J37/224 , H01J37/244 , H01J2237/006 , H01J2237/20221 , H01J2237/2445 , H01J2237/2817
Abstract: An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.
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公开(公告)号：US20060240586A1
公开(公告)日：2006-10-26
申请号：US10530754
申请日：2003-10-08
Applicant: Hiroya Kobayashi , Masaharu Muramatsu
Inventor： Hiroya Kobayashi , Masaharu Muramatsu
IPC: H01L21/00
CPC classification number: H01J37/224 , H01J37/244 , H01J2237/2443 , H01J2237/2445 , H01L27/14618 , H01L27/14806 , H01L31/0203 , H01L2924/15153 , H01L2924/15165 , H01L2924/15312 , H01L2924/15787 , H01L2924/19107 , H04N5/2253 , H04N5/2254
Abstract: The present invention relates to an image pickup device, etc., having a structure such that electrostatic discharge is unlikely to occur when an FOP and a CCD reading part are joined. This image pickup device comprises a semiconductor substrate, provided with the CCD reading part on a front surface that opposes a back surface, which serves as a light-incident surface, a package having a cavity in which the semiconductor substrate is fixed, a cover covering an upper opening of the cavity, an FOP joined to the semiconductor substrate, and electrical wirings. The cover has a guiding opening for inserting the FOP into the cavity, and the semiconductor substrate is thinned at a portion corresponding to a region at which the CCD reading part is disposed. Also, the semiconductor substrate is fixed to a bottom surface of the cavity such that the CCD reading part and the bottom surface face each other, and a light outgoing end surface of the FOP is optically coupled to the thin part of the semiconductor substrate in the state of being inserted into the cavity from the guiding opening.
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公开(公告)号：US6061085A
公开(公告)日：2000-05-09
申请号：US8009
申请日：1998-01-16
Applicant: Ingo Daberkow , Manfred Schierjott , Jurgen Tumpner
Inventor： Ingo Daberkow , Manfred Schierjott , Jurgen Tumpner
CPC classification number: H01J37/224 , H01J2237/2445 , H01J2237/26
Abstract: A camera system for a transmission electron microscope includes a luminescent screen and prism within the transmission electron microscope evacuated housing and a camera outside the housing. An optical lens system between the prism and the camera can be provided on opposite sides of a wall of the housing have a vacuum window. The luminescent screen, prism, optical lens system and camera have a common structure fixedly connecting them together and enabling them to shift relative to the electron beam via a pneumatic effector.
Abstract translation: 用于透射电子显微镜的照相机系统包括在透射电子显微镜抽真空壳体内的发光屏和棱镜，以及壳体外的照相机。 在棱镜和相机之间的光学透镜系统可以设置在壳体的壁的相对侧上，具有真空窗口。 荧光屏，棱镜，光学透镜系统和照相机具有将它们固定连接在一起的共同结构，并使它们能够通过气动执行器相对于电子束移动。
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公开(公告)号：US5675148A
公开(公告)日：1997-10-07
申请号：US827422
申请日：1992-01-29
Applicant: Takao Marui
Inventor： Takao Marui
CPC classification number: H01J37/28 , H01J31/48 , H01J37/224 , H01J37/2955 , H01J2237/2445 , H01J2237/2544
Abstract: A scanning reflection electron diffraction microscope causes a primary electron beam from its electron gun to be reflectively diffracted from a sample and a diffraction pattern to be formed on a fluorescent screen. An optical lens reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface, thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil and a condenser coil, the image-carrying electron beam is detected by an electron-multiplier such that a diffraction pattern is displayed on a cathode ray tube.
Abstract translation: 扫描反射型电子衍射显微镜使来自电子枪的一次电子束从样品反射衍射并形成荧光屏上的衍射图案。 光学透镜减小了这种衍射图案的尺寸，并在光电表面上形成了缩小的图像，从而产生了图像携带电子束。 通过包括偏转线圈和冷凝器线圈的偏转系统偏转，通过电子倍增器检测图像携带电子束，使得衍射图案显示在阴极射线管上。
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公开(公告)号：US5517033A
公开(公告)日：1996-05-14
申请号：US279928
申请日：1994-07-25
Applicant: Ondrej L. Krivanek , Paul E. Mooney , Daniel N. Bui
Inventor： Ondrej L. Krivanek , Paul E. Mooney , Daniel N. Bui
IPC: G01Q30/04 , H01J37/22 , H01J37/244
CPC classification number: H01J37/224
Abstract: An apparatus for improving the resolution of images produced by an electron microscope is provided and includes an electron beam forming an electron image, a support structure mounted in the path of the electron beam, with the support structure transmitting the electron image. Scintillating material is coated onto the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image. A mirror is provided for deflecting the optical path of the light image into a CCD camera positioned to receive and record the light image.
Abstract translation: 提供一种用于提高由电子显微镜产生的图像的分辨率的装置，并且包括形成电子图像的电子束，安装在电子束路径中的支撑结构，支撑结构透射电子图像。 闪烁材料涂覆在与电子图像入射的相反侧的支撑结构侧，闪烁材料将电子图像转换成光图像。 提供了用于将光图像的光路偏转到定位成接收和记录光图像的CCD照相机的镜子。
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