公开(公告)号：US20160069755A1

公开(公告)日：2016-03-10

申请号：US14842273

申请日：2015-09-01

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takeru SAMEJIMA ,  Nobuyuki HAMAMATSU ,  Takashi YOSHIDA

IPC: G01L1/18 ,  G01L19/00 ,  G01D11/30

CPC classification number: G01L1/18 ,  G01D11/30 ,  G01L1/26 ,  G01L19/0092 ,  G01L19/04

Abstract: A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.

Abstract translation: 传感器包括可附接到测量样本的第一结构，由与第一结构相比热膨胀系数小的材料制成的第二结构，第二结构的底表面连接到第一结构，以及 检测器，其连接到第二结构的上表面，检测器被配置为检测第二结构的变形。