ATTACHMENT FOR FLUID CHARACTERISTIC MEASUREMENT SENSOR

    公开(公告)号:US20240200706A1

    公开(公告)日:2024-06-20

    申请号:US18084919

    申请日:2022-12-20

    发明人: Luke SOUTH Ibuki SATO

    IPC分类号: F16L41/00 G01L19/00

    摘要: A metal tube (10) constituting a fluid flow path (12) is cut, and an attachment (14A) for a fluid characteristic measurement sensor is interposed between end portions of the cut metal tubes (10). The attachment (14A) includes a body (16A) through which a body flow path (1606) extends through and to which a temperature sensor (18) and a pressure sensor (20) are attached in advance and a pair of connection members (22) that connect a fluid flow path (12) and the body flow path (1606). Joint fittings (24A) are allowed to be used as a pair of connection members (22). The attachment improves workability 10 when measuring a characteristic of a fluid and reliably reducing a leakage of the fluid.

    MEMS SENSOR
    5.
    发明公开
    MEMS SENSOR 审中-公开

    公开(公告)号:US20240183734A1

    公开(公告)日:2024-06-06

    申请号:US18525746

    申请日:2023-11-30

    申请人: ROHM CO., LTD.

    发明人: Masahiro SAKURAGI

    摘要: The present disclosure provides a MEMS sensor. The MEMS sensor includes: a substrate, on which a first sensor region for an acceleration sensor is formed; a first cavity, formed in the first sensor region of the substrate; a first weight portion, including a first membrane formed on the first cavity; a beam portion, supporting the first weight portion; and a piezoresistor, formed in the beam portion. A first opposing surface of the first weight portion facing the first cavity and a second opposing surface of the beam portion facing the first cavity are formed on same plane.