公开(公告)号：US09891119B2

公开(公告)日：2018-02-13

申请号：US14842273

申请日：2015-09-01

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takeru Samejima ,  Nobuyuki Hamamatsu ,  Takashi Yoshida

IPC: G01B7/16 ,  G01L1/18 ,  G01L19/04 ,  G01L1/26 ,  G01D11/30 ,  G01L19/00

CPC classification number: G01L1/18 ,  G01D11/30 ,  G01L1/26 ,  G01L19/0092 ,  G01L19/04

Abstract: A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.