公开(公告)号：US08454068B2

公开(公告)日：2013-06-04

申请号：US12951356

申请日：2010-11-22

申请人： Yasuhiko Hashimoto ,  Tośhiaki Yoshida

发明人： Yasuhiko Hashimoto ,  Tośhiaki Yoshida

IPC分类号： B25J15/00

CPC分类号： B25J15/00

摘要： A chuck hand 1 includes a pressing mechanism 14 having a pusher 25 which presses a semiconductor process wafer 3 in the direction of a front guide 12 to thereby grip the semiconductor process wafer 3. The pressing mechanism 14 further has a pusher supporting body 22 and a buffering member 28. The pusher supporting body 22 is configured such that it can advance and retract. The pusher supporting body 22 is disposed in the pusher 25 such that it can slide back and forth. A gap 26a is defined forward relative to the pusher supporting body 22. The buffering member 28, which has a low bounce and is elastically deformable, is interposingly placed in the gap 26a. When the pusher supporting body 22 moves forward, it pushes the pusher 25 through the buffering member 28 whereby the pusher 25 is moved forward. The pusher 25 is abutted and pressed against the semiconductor process wafer 3.

摘要翻译： 卡盘手1包括按压机构14，该按压机构14具有按照前导向件12的方向按压半导体处理晶片3从而夹持半导体处理晶片3的推动器25.按压机构14还具有推动支撑体22和 缓冲构件28.推动器支撑体22构造成能够前进和后退。 推动器支撑体22设置在推动器25中，使得其可以前后滑动。 间隙26a相对于推动器支撑体22被向前定义。具有低反弹并且可弹性变形的缓冲构件28插入地设置在间隙26a中。 当推动器支撑体22向前移动时，推动器25通过缓冲构件28推动推动器25向前移动。 推动器25抵靠半导体处理晶片3。