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公开(公告)号：US06878048B2
公开(公告)日：2005-04-12
申请号：US10864031
申请日：2004-06-08
申请人： Yehiel Gotkis , David Wei , Aleksander Owzarz
发明人： Yehiel Gotkis , David Wei , Aleksander Owzarz
摘要： An apparatus for reducing non-uniform stretch of a belt used in the CMP system is disclosed. The belt that may be used with the apparatus extends between a first roller and a second roller to define a belt loop with an inner surface and an outer surface to be used for CMP. The apparatus includes a compensating roller that has a first end and a second end where the first end and second end extends a width of the belt. The first end and the second end have a first diameter. The center of the roller has a second diameter that is less than the first diameter. The compensating roller has a symmetrically tapered shape that extends between each of the first end and second end to the center. The compensating roller is positioned inside of the belt loop, and is applied to the inner surface of the belt loop to reduce non-uniform stretch of the belt.
摘要翻译： 公开了一种用于减小在CMP系统中使用的带的不均匀拉伸的装置。 可以与该装置一起使用的带在第一辊和第二辊之间延伸以限定具有用于CMP的内表面和外表面的带环。 该装置包括补偿辊，该补偿辊具有第一端和第二端，其中第一端和第二端延伸带的宽度。 第一端和第二端具有第一直径。 辊的中心具有小于第一直径的第二直径。 补偿辊具有对称渐缩的形状，其在第一端和第二端的每一端之间延伸到中心。 补偿辊位于皮带环的内侧，并被施加到皮带环的内表面以减少皮带的不均匀拉伸。
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公开(公告)号：US06749491B1
公开(公告)日：2004-06-15
申请号：US10033501
申请日：2001-12-26
申请人： Yehiel Gotkis , David Wei , Aleksander Owzarz
发明人： Yehiel Gotkis , David Wei , Aleksander Owzarz
IPC分类号： B24B2120
摘要： An apparatus for reducing non-uniform stretch of a belt used in the CMP system is disclosed. The belt that may be used with the apparatus extends between a first roller and a second roller to define a belt loop with an inner surface and an outer surface to be used for CMP. The apparatus includes a compensating roller that has a first end and a second end where the first end and second end extends a width of the belt. The first end and the second end have a first diameter. The center of the roller has a second diameter that is less than the first diameter. The compensating roller has a symmetrically tapered shape that extends between each of the first end and second end to the center. The compensating roller is positioned inside of the belt loop, and is applied to the inner surface of the belt loop to reduce non-uniform stretch of the belt.
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