公开(公告)号：US06498350B2

公开(公告)日：2002-12-24

申请号：US09739106

申请日：2000-12-19

申请人： Yim Bun P. Kwan ,  Engelbertus A. F. van de Pasch ,  Andreas B. G. Ariens ,  Edwin J. Buis ,  Jan F. Hoogkamp ,  Robert-Han Munnig Schmidt

发明人： Yim Bun P. Kwan ,  Engelbertus A. F. van de Pasch ,  Andreas B. G. Ariens ,  Edwin J. Buis ,  Jan F. Hoogkamp ,  Robert-Han Munnig Schmidt

IPC分类号： H01J3713

CPC分类号： G03F7/70733 ,  G03F7/70716

摘要： In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.

摘要翻译： 在其中衬底台可以在其中将基板装载到桌子上并从桌子上移除的第一工作区域和其中晶片暴露的第二工作区域之间进行交换的多工位平版印刷设备中，提供了防止碰撞的装置， 交流过程。 碰撞防止装置可以由迷宫式或旋转门形成。 交换过程可以通过彼此连接的梭子（可选地包括驱动装置）来控制，使得表只能在区域之间交换。