公开(公告)号：US06692145B2

公开(公告)日：2004-02-17

申请号：US10001919

申请日：2001-10-31

申请人： Yogesh B. Gianchandani ,  Mo-Huang Li ,  Julius Wu

发明人： Yogesh B. Gianchandani ,  Mo-Huang Li ,  Julius Wu

IPC分类号： G01K724

CPC分类号： G01K7/028

摘要： A micromachined thermal probe has a substrate with a surface and an edge, and at least one flexible probe body formed on the substrate that includes a cantilever beam section that extends from a proximal end outwardly to a distal end. A pair of conductors in the probe body extend to a junction at the distal end at which is formed a probe tip. Current passed through the conductors to the junction heats the probe tip, with changes in the effective probe resistance occurring as the probe tip is scanned over a sample with different thermal conductivities at different positions. A second flexible probe body may be mounted to the substrate and constructed similarly to the first probe body to act as a reference probe to allow compensation of the first probe. The probe body may be formed of layers of flexible polymer joined together over pairs of conductors, which is bent back onto itself and secured together at a proximal end of the cantilever beam.

摘要翻译： 微加工热探针具有表面和边缘的基底，以及形成在基底上的至少一个柔性探针体，其包括从近端向外延伸到远端的悬臂梁部分。 探针主体中的一对导体延伸到远端处的一个连接处，在该连接处形成探针尖端。 通过导线穿过接头的电流会加热探针尖端，当探头尖端扫描不同位置不同导热系数的样品时，会发生有效探头电阻的变化。 第二柔性探针体可以安装到基底并且类似于第一探针体构造以用作参考探针以允许补偿第一探针。 探针主体可以由柔性聚合物层形成，这些层由成对的导体连接在一起，该导体被弯曲回自身并且在悬臂梁的近端处固定在一起。