Multi-focusing laser beam recorder and multi-focusing method thereof
    3.
    发明授权
    Multi-focusing laser beam recorder and multi-focusing method thereof 失效
    多聚焦激光束记录仪及其多重聚焦方法

    公开(公告)号:US06067105A

    公开(公告)日:2000-05-23

    申请号:US997852

    申请日:1997-12-24

    申请人: Seon Kyoung Kim

    发明人: Seon Kyoung Kim

    摘要: A multi-focusing laser beam recorder and a multi-focusing method includes first and second light sources for generating a Kr laser beam for recording light and an He--Ne laser beam for focusing. A fixed optical system modulates the Kr laser beam for recording light and divides the beam into a main beam and a sub beam on each of different paths. An optical divider divides the main beam or the sub beam incident through a shutter of the fixed optical system and the He--Ne laser beam incident from the second light source. A focus servo focuses either the main beam or the sub beam from the optical divider and the He--Ne laser beam on a predetermined area of the glass substrate. First, second and third position sensor controllers control the focus servo to focus the He--Ne laser beam on the glass substrate in response to the pit width of the glass substrate by sensing the laser beam for focusing reflected upon the glass substrate. In such a multi-focusing laser beam recorder, it is possible to reduce required time and price related to process steps and to enable using the position sensors to cut any pit.

    摘要翻译: 多聚焦激光束记录器和多重聚焦方法包括用于产生用于记录光的Kr激光束的第一和第二光源和用于聚焦的He-Ne激光束。 固定的光学系统调制用于记录光的Kr激光束,并将光束分成主光束和每个不同路径上的子光束。 光分路器通过固定光学系统的快门和从第二光源入射的He-Ne激光束分离入射的主光束或子光束。 聚焦伺服将来自分光器的主光束或子光束与He-Ne激光束聚焦在玻璃基板的预定区域上。 首先,第二和第三位置传感器控制器通过感测用于聚焦在玻璃基板上的聚焦来响应于玻璃基板的凹坑宽度而控制聚焦伺服以将He-Ne激光束聚焦在玻璃基板上。 在这种多焦点激光束记录器中,可以减少与处理步骤相关的所需时间和价格,并且能够使用位置传感器来切割任何凹坑。