公开(公告)号：US07204686B2

公开(公告)日：2007-04-17

申请号：US10663655

申请日：2003-09-17

申请人： Yong-Chen Chung ,  Chia-Hung Lin ,  Chuan-Feng Chen ,  Chia-Chun Hsu ,  Wen-Hung Feng ,  Ming-Chi Chen

发明人： Yong-Chen Chung ,  Chia-Hung Lin ,  Chuan-Feng Chen ,  Chia-Chun Hsu ,  Wen-Hung Feng ,  Ming-Chi Chen

IPC分类号： B29C59/02

CPC分类号： B82Y10/00 ,  B29C33/303 ,  B29C59/022 ,  B29C2059/023 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S425/019

摘要： A parallelism adjustment device applicable to nano-imprint lithography has an imprint unit, a carrier unit, a parallelism adjustment mechanism, and a driving source. The imprint unit has a first molding plate and an imprinting mold mounted on the first molding plate. The carrier unit has a second molding plate and a substrate mounted on the second molding plate. The parallelism adjustment mechanism has an enclosed resilient film and a fluid filled therein, and is coupled to at least one of the first and second molding plates. The driving source drives at least one of the imprint unit and the carrier unit to form contact between the mold and the moldable layer. The parallelism adjustment device is pressed via the contact to adjust parallelism for the imprint mold and the substrate and uniformly distributes the pressure between the mold and the substrate, making the molding quality of nano-imprint lithography significantly improved.

摘要翻译： 适用于纳米压印光刻的平行度调节装置具有压印单元，载体单元，平行度调节机构和驱动源。 压印单元具有安装在第一模板上的第一模板和压印模。 载体单元具有安装在第二模板上的第二模板和基板。 平行度调节机构具有封闭的弹性膜和填充在其中的流体，并且联接到第一和第二模制板中的至少一个。 驱动源驱动压印单元和载体单元中的至少一个，以在模具和可模制层之间形成接触。 平行度调节装置通过触点按压，调整压印模具和基板的平行度，均匀分布模具与基板之间的压力，使纳米压印光刻的成型质量得到显着提高。

公开(公告)号：US06994541B2

公开(公告)日：2006-02-07

申请号：US10663830

申请日：2003-09-17

申请人： Yong-Chen Chung ,  Chia-Hung Lin ,  Chia-Chun Hsu ,  Chuan-Feng Chen ,  Wen-Hung Feng ,  Ming-Chi Chen

发明人： Yong-Chen Chung ,  Chia-Hung Lin ,  Chia-Chun Hsu ,  Chuan-Feng Chen ,  Wen-Hung Feng ,  Ming-Chi Chen

IPC分类号： B29C59/02

CPC分类号： B29C59/022 ,  B29C2059/023 ,  Y10S425/019

摘要： A uniform pressing apparatus used in nanoimprint lithographic process is proposed, including a housing having a first flange; a first carrier unit for carrying an imprint mold and having at least one second flange freely attaches to the first flange; a second carrier unit for carrying a substrate; at least one uniform pressing unit mounted on a imprint force transmission path; and a power source driving at least one of the housing and the second carrier unit to allow a contact to be formed between the mold and the moldable layer. Therefore, the nanoimprint lithographic process is achieved with good parallelism between the substrate and the mold and with uniform pressure distribution.

摘要翻译： 提出了一种用于纳米压印光刻工艺的均匀压制装置，包括具有第一凸缘的壳体; 用于承载压印模具并且具有至少一个第二凸缘自由地附接到所述第一凸缘的第一承载单元; 用于承载基板的第二载体单元; 安装在压印力传递路径上的至少一个均匀的按压单元; 以及驱动所述壳体和所述第二托架单元中的至少一个的电源，以允许在所述模具和所述可模制层之间形成接触。 因此，纳米压印平版印刷工艺在基片和模具之间具有良好的平行度并具有均匀的压力分布。

公开(公告)号：US07090477B2

公开(公告)日：2006-08-15

申请号：US10405319

申请日：2003-04-01

申请人： Chia-Chun Hsu ,  Yong-Chen Chung ,  Chia-Hung Lin ,  Wen-Hung Feng ,  Ming-Chi Chen

发明人： Chia-Chun Hsu ,  Yong-Chen Chung ,  Chia-Hung Lin ,  Wen-Hung Feng ,  Ming-Chi Chen

IPC分类号： B29C45/50

CPC分类号： B29C45/5008 ,  B29C2045/1793 ,  B29C2045/5024 ,  B29C2045/504

摘要： An electromagnetic coaxial driving injection apparatus, having a linear motor for driving injection and a rotation motor for metering. The linear motor and the rotation motor of both the injection and metering motors and an injection screw are set on a common axis. A connecting device connects moving parts of the motors with the injection screw. Stationary parts of the motors are fastened on a frame and forward-backward moving unit, not moving during injection and metering. Due to the arrangement of the moving parts and the injection screw on a single axis, moving parts are lessened, and transmission losses are minimized. Since the number of structural parts is low, only the moving parts of the motors move during injection while the stationary parts thereof remain at rest, thus greatly reducing inertia. Furthermore, since the moving axis of the injection screw and the injection screw are linked, without being connected with stators or other structural parts, injection is performed with minimal friction, enhancing effectiveness of the apparatus.The main characteristic of the present invention is that, due to direct driving of injection without mechanical transmission, the effects of hysteresis and backlash are avoided. Furthermore, inertia and friction are reduced. The present invention increases the response and reappearance of the system.

摘要翻译： 一种具有用于驱动注射的线性电动机和用于计量的旋转电动机的电磁同轴驱动注射装置。 注射和计量电机的线性电动机和旋转电动机和注射螺钉都设置在公共轴上。 连接装置将电动机的运动部件与注射螺杆连接起来。 马达的固定部件固定在框架和前后移动单元上，在注射和计量期间不移动。 由于移动部件和注射螺杆在单个轴上的布置，运动部件减少，传动损失最小化。 由于结构部件的数量少，所以在注射期间只有马达的运动部件在其静止部分保持静止的状态下移动，从而大大降低了惯性。 此外，由于注射螺杆和注射螺杆的移动轴线连接而不与定子或其他结构部件连接，所以以最小的摩擦进行注射，提高了装置的有效性。 本发明的主要特征在于，由于直接驱动没有机械传动的注射，所以避免了滞后和反向间隙的影响。 此外，减少惯性和摩擦。 本发明增加了系统的响应和再现性。

公开(公告)号：US06662850B2

公开(公告)日：2003-12-16

申请号：US10143958

申请日：2002-05-14

申请人： Yong-Chen Chung ,  Chia-Chun Hsu ,  Ming-Chang Dang

发明人： Yong-Chen Chung ,  Chia-Chun Hsu ,  Ming-Chang Dang

IPC分类号： E06B930

CPC分类号： E06B9/32

摘要： A lift cord concealable Venetian blind lift control mechanism is constructed to include a base having two hollow screw rods axially aligned at two sides and selectively mounted in the top or bottom rail of a Venetian blind, a revolving rod inserted through the hollow screw rods, a spring member, which provides a torsional force to the revolving rod, two bobbins respectively threaded onto the screw rods for synchronous rotation with the revolving rod. The left and right lift cords of the Venetian blind each have one end connected to the bottom or top rail and the other end fastened to the bobbin such that when the bottom rail of the Venetian blind lifted or lowered by an external force, the bobbins are synchronously rotated to wind up or let off the lift cords; when the external force disappeared, the bobbins are immovable, keeping the bottom rail in position.

摘要翻译： 提升绳索可隐蔽的威尼斯提升控制机构被构造成包括具有两个在两侧轴向对齐并且选择性地安装在百叶帘的顶部或底部轨道中的两个中空螺杆的基座，通过中空螺杆插入的旋转杆， 向旋转杆提供扭转力的弹簧构件，分别旋拧到螺杆上的两个线轴与旋转杆同步旋转。 威尼斯百叶窗的左右提升帘线各自具有连接到底部或顶部导轨的一端，另一端紧固到筒管，使得当威尼斯人的底部轨道通过外力提升或降低时，线轴是 同步旋转以卷起或放下电梯线; 当外力消失时，线轴不可移动，将底轨保持在适当位置。