公开(公告)号：US20100224219A1

公开(公告)日：2010-09-09

申请号：US12782265

申请日：2010-05-18

申请人： Yoshikazu KADO ,  Tsuyoshi Tomita

发明人： Yoshikazu KADO ,  Tsuyoshi Tomita

IPC分类号： B08B7/00

CPC分类号： H01L21/67248 ,  B05C3/09 ,  B05C11/1042

摘要： A substrate treating apparatus includes a treating unit for treating substrates, a piping for supplying a treating liquid to the treating unit, a heater mounted on the piping, an electronic thermal unit mounted on the piping in series with the heater, a temperature sensor for measuring a temperature of the treating liquid, and a controller for controlling the heater and the electronic thermal unit. The controller sets a first temperature control mode for performing a room temperature control using the electronic thermal unit when the temperature measured by the temperature sensor is below a predetermined boundary temperature between room temperature and high temperature, and for performing a high temperature control with the heater when the temperature measured by the temperature sensor is above the predetermined boundary temperature between room temperature and high temperature. The controller sets a second temperature control mode for performing a heating control using the heater and the electronic thermal unit to heat the treating liquid when a difference between the temperature measured by the temperature sensor and a target temperature at least corresponds to a first specified value set beforehand. Further, the controller sets the first temperature control mode when, after the second temperature control mode is set, the difference between the temperature measured by the temperature sensor and the target temperature becomes less than a second specified value set beforehand.

摘要翻译： 基板处理装置包括处理基板的处理单元，向处理单元供给处理液的配管，安装在配管上的加热器，安装在与加热器串联的配管上的电子热单元，测量用温度传感器 处理液的温度，以及用于控制加热器和电子热单元的控制器。 当由温度传感器测量的温度低于室温和高温之间的预定边界温度时，控制器设置第一温度控制模式，用于使用电子热单元进行室温控制，并且使用加热器进行高温控制 当由温度传感器测量的温度高于室温和高温之间的预定边界温度时。 控制器设置第二温度控制模式，用于当由温度传感器测量的温度与目标温度之间的差异至少对应于第一指定值组时，使用加热器和电子热单元执行加热控制以加热处理液体 预先。 此外，控制器设定第一温度控制模式，在设定第二温度控制模式之后，由温度传感器测量的温度与目标温度之间的差变得小于预先设定的第二规定值。