公开(公告)号：US20130199275A1

公开(公告)日：2013-08-08

申请号：US13879484

申请日：2011-09-29

申请人： Yoshikazu Matsumoto ,  Norimasa Seto ,  Daisuke Nakamura ,  Akihiro Maeda

发明人： Yoshikazu Matsumoto ,  Norimasa Seto ,  Daisuke Nakamura ,  Akihiro Maeda

IPC分类号： G01M3/20

CPC分类号： G01M3/205 ,  F04D19/042

摘要： Provided is a convenient leak detector which has high detection sensitivity and can quickly start a leak test after the start of vacuuming a test piece, without impairing the capabilities such as fast response to helium gas. The leak detector includes a mass spectrometer tube configured to detect a search gas and a turbo-molecule pump which has a plurality of stages rotors and stators alternately arranged in a housing, the rotors attached to a rotary shaft, and includes a drive source configured to rotationally drive the rotary shaft. An intake port communicating with a test piece TP and a connection port to which the mass spectrometer tube is connected are opened at positions away from each other in a wall surface of the housing, the wall surface facing a rotor of the uppermost stage.

摘要翻译： 提供了一种方便的检测器，其具有高检测灵敏度，并且可以在开始抽真空试样之后快速开始泄漏测试，而不损害诸如对氦气的快速响应的能力。 该检漏仪包括一个构造成检测搜索气体的质谱仪管和一个涡轮分子泵，其具有交替布置在壳体中的多个级转子和定子，转子附接到旋转轴上，并包括驱动源， 旋转驱动旋转轴。 与测试件TP连通的进气口和连接质谱仪管的连接口在壳体的壁面上彼此远离的位置处敞开，壁面面向最上层的转子。