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公开(公告)号：US12129861B2
公开(公告)日：2024-10-29
申请号：US18000047
申请日：2021-05-28
发明人： Katsunori Takahashi
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/048
摘要： An object is to prevent backflow of particles during discharging. The vacuum pump includes: a casing having an inlet port and an outlet port; a stator column provided upright inside the casing; a rotating body having a shape surrounding an outer circumference of the stator column; and a magnetic bearing configured to magnetically levitate and support a rotating shaft of the rotating body, with the vacuum pump being configured to suck gas from the inlet port and exhaust the gas from the outlet port by rotation of the rotating body, wherein a projection portion for discharging an electric charge carried on the rotating body is provided at at least one of a first position formed on a back surface side of the rotating body, a second position formed on a bottom surface side of the rotating body, and a third position formed in an intermediate point of a flow passage of the gas of the rotating body.
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公开(公告)号：US12092119B2
公开(公告)日：2024-09-17
申请号：US17608326
申请日：2020-04-27
申请人： Edwards Limited
发明人： Emiliano Lucchetta
IPC分类号： F04D19/04 , F04D29/059 , F04D17/16 , F04D29/058 , F04D29/063
CPC分类号： F04D19/042 , F04D29/059 , F04D17/168 , F04D29/058 , F04D29/063 , F16C2360/45
摘要： Lubricant supply system comprising a lubricant container body defining a lubricant reservoir wherein the lubricant container body comprising an indentation of through-hole to receive a lubricant transfer device of a vacuum pump. Therein, the indentation of through-hole is surrounded by a collar extending from the lubricant container body.
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公开(公告)号：US12078178B2
公开(公告)日：2024-09-03
申请号：US18256020
申请日：2021-12-21
CPC分类号： F04D19/042 , F04D27/006 , F04D29/582 , F04D29/701
摘要： A vacuum pump and a control device, on a pump side, performs heater control of a pipe to suppress precipitation of a deposit from a process gas and cooling control of a deposit trap to remove the deposit, and perform heater control and cooling control the process gas situation. A temperature sensor is disposed on an outer periphery or an inner periphery of an introduction pipe 3H, outputs temperature information a control device. Temperature information from the inside of a deposit trap is also sent to control device. The control device, performs ON/OFF control a heater such that a temperature of the introduction pipe 3H has a predetermined temperature value, based on the input temperature information 31. The control device, performs opening/closing control on a valve such that an internal temperature of the deposit trap has a predetermined cooling temperature value, based on the input temperature information.
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公开(公告)号：US12044251B2
公开(公告)日：2024-07-23
申请号：US17436426
申请日：2020-03-09
CPC分类号： F04D29/666 , F04D19/042 , F04D29/388 , F04D29/644 , F04D29/662
摘要： A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.
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公开(公告)号：US12025142B2
公开(公告)日：2024-07-02
申请号：US17686509
申请日：2022-03-04
申请人： SHIMADZU CORPORATION
发明人： Tomoki Yasuda
CPC分类号： F04D19/042 , F04D29/023 , F04D29/522 , F05D2300/17
摘要： A vacuum pump comprises: a rotor having multiple stages of rotor blades and a rotor cylindrical portion; a stator having multiple stages of stator blades and a stator cylindrical portion; a base housing the rotor and the stator; and a cover member configured to cover an inner wall portion of the base forming an internal space positioned on a gas-discharge downstream side with respect to gas-discharge-downstream-side end portions of the rotor cylindrical portion and the stator cylindrical portion. An inner peripheral side end of the cover member extends from the internal space to a position overlapping with an inner peripheral surface of the rotor cylindrical portion.
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公开(公告)号：US11946482B2
公开(公告)日：2024-04-02
申请号：US17625165
申请日：2020-07-03
IPC分类号： F04D29/04 , F04D19/04 , F04D29/048
CPC分类号： F04D29/048 , F04D19/042
摘要： A vacuum pump and a washer which can reduce vibration of a rotor and the rotor which can reduce the vibration are provided. When an inertia moment ratio which is a ratio between the inertia moment around a z-axis and the inertia moment around an x-axis or a y-axis is larger than 1, a natural frequency ω2 does not match a rotational frequency Ωz but goes away from that. When the natural frequency ω2 matches the rotational frequency Ωz, the rotor vibrates and thus, a fatigue failure occurs in a rotor blade. When the rotor is to be made larger in a radial direction of a rotating shaft, a value of the inertia moment ratio is set to a value larger than 1.
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公开(公告)号：US20240060496A1
公开(公告)日：2024-02-22
申请号：US18256020
申请日：2021-12-21
CPC分类号： F04D19/042 , F04D27/006 , F04D29/701 , F04D29/582
摘要： A vacuum pump and a control device, on a pump side, performs heater control of a pipe to suppress precipitation of a deposit from a process gas and cooling control of a deposit trap to remove the deposit, and perform heater control and cooling control the process gas situation. A temperature sensor is disposed on an outer periphery or an inner periphery of an introduction pipe 3H, outputs temperature information a control device. Temperature information from the inside of a deposit trap is also sent to control device. The control device, performs ON/OFF control a heater such that a temperature of the introduction pipe 3H has a predetermined temperature value, based on the input temperature information 31. The control device, performs opening/closing control on a valve such that an internal temperature of the deposit trap has a predetermined cooling temperature value, based on the input temperature information.
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公开(公告)号：US20240026888A1
公开(公告)日：2024-01-25
申请号：US18044815
申请日：2021-10-01
CPC分类号： F04D19/042 , F04D29/321 , F05D2250/292
摘要： A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.
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公开(公告)号：US11835049B2
公开(公告)日：2023-12-05
申请号：US17494901
申请日：2021-10-06
申请人： SHIMADZU CORPORATION
发明人： Koichi Shimizu
CPC分类号： F04D19/042 , F04D27/001 , F04D29/582
摘要： A turbo-molecular pump comprises: a turbine pump portion having rotor blades and stator blades arranged in multiple stages in an axial direction; a drag pump portion provided on a downstream side of the turbine pump portion; a case housing the turbine pump portion; a base housing the drag pump portion; and a temperature adjustment unit provided between the case and the base. The temperature adjustment unit includes a temperature adjustment spacer forming a pump casing together with the case and the base and, the temperature adjustment unit includes a cooler, a heater, and a temperature detector which are provided at the temperature adjustment spacer.
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公开(公告)号：US11821440B2
公开(公告)日：2023-11-21
申请号：US16967892
申请日：2019-02-08
发明人： Yanbin Sun , Kengo Saegusa
CPC分类号： F04D29/5813 , F28D9/0081 , F04D19/042
摘要： To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.
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