公开(公告)号：US20070287087A1

公开(公告)日：2007-12-13

申请号：US11802688

申请日：2007-05-24

申请人： Yoshiko Miya ,  Kensaku Maeda ,  Masanori Harasawa ,  Yoichi Ootsuka

发明人： Yoshiko Miya ,  Kensaku Maeda ,  Masanori Harasawa ,  Yoichi Ootsuka

IPC分类号： G03G5/00

CPC分类号： G03F7/0007 ,  G03F7/0382

摘要： The present invention provides a colored photosensitive resin composition which causes a small change in exposure when a pattern is subjected to projection exposure. Disclosed is a colored photosensitive resin composition comprising a dye, a photo acid generator, a curing agent, an alkali-soluble resin, a solvent, and a compound represented by the formula (I): in the formula (I), R1 to R3 each independently represents a hydrogen atom, a linear alkyl group having 1 to 6 carbon atoms, a branched alkyl group having 3 to 12 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an aryl group having 6 to 12 carbon atoms, and a hydrogen atom on the linear alkyl group having 1 to 6 carbon atoms, a hydrogen atom on the branched alkyl group having 3 to 12 carbon atoms, a hydrogen atom on the cycloalkyl group and a hydrogen atom on the aryl group may be substituted with a hydroxyl group, provided that at least one of R1 to R3 represents a group other than a hydrogen atom.

摘要翻译： 本发明提供一种着色感光性树脂组合物，其在图案经受投影曝光时引起曝光的微小变化。 公开了一种着色光敏树脂组合物，其包含染料，光酸产生剂，固化剂，碱溶性树脂，溶剂和由式（I）表示的化合物：在式（I）中，R

公开(公告)号：US20070287086A1

公开(公告)日：2007-12-13

申请号：US11802687

申请日：2007-05-24

申请人： Masanori Shinada ,  Masanori Harasawa ,  Kensaku Maeda ,  Yoichi Ootsuka

发明人： Masanori Shinada ,  Masanori Harasawa ,  Kensaku Maeda ,  Yoichi Ootsuka

IPC分类号： G03G5/00

CPC分类号： G03F7/0007 ,  G02B5/223 ,  G03F7/105

摘要： An object of the present invention is to provide a colored photosensitive resin composition which causes a small change in exposure in case of forming a pattern before and after storage. Disclosed is a colored photosensitive resin composition comprising a dye, a photo acid generator, a curing agent, and an alkali-soluble resin and solvent, wherein the dye contains C.I. Solvent Yellow 88 and the photo acid generator contains a sulfonate ester compound.

摘要翻译： 本发明的目的是提供一种着色的感光性树脂组合物，其在形成保存前后的图案的情况下使曝光量变化小。 公开了一种着色的感光性树脂组合物，其包含染料，光酸产生剂，固化剂和碱溶性树脂和溶剂，其中所述染料含有C.I. 溶剂黄88和光酸产生剂含有磺酸酯化合物。