摘要:
The invention is directed to improvement of a write element of a thin film magnetic head. In said write element, a first coil and a second coil are provided on a first insulating film formed on one surface of a first magnetic film and surround in a spiral form a back gap portion. A second yoke portion in the upper position comprises a wide portion, a narrow portion and a sloping flare portion. The wide portion has a flat surface and is connected to the first magnetic film by a back gap portion at the rear of the medium-facing surface. The narrow portion forms the second pole portion and the surface of the narrow portion being at a lower position than the surface of the wide portion. The sloping flare portion extends from the narrow portion to the wide portion, gradually increasing in width and its surface sloping upward away from the surface of the narrow portion to the surface of the wide portion.
摘要:
A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.
摘要:
A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof; etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.
摘要:
A magnetic head includes: a pole layer; a pole-layer-encasing layer made of a nonmagnetic material and having a top surface and a groove that opens at the top surface; and a nonmagnetic layer that is made of a nonmagnetic metal material, disposed in the groove and forms a pole-layer-encasing section that accommodates the pole layer. A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof, etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.
摘要:
A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.
摘要:
A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.
摘要:
A pole layer incorporates: a first portion having an end face located in a medium facing surface; and a second portion having a thickness greater than that of the first portion. A surface of the first portion closer to a substrate is located farther from the substrate than a surface of the second portion closer to the substrate. A surface of the first portion farther from the substrate is located closer to the substrate than a surface of the second portion farther from the substrate. At least a portion of the pole layer is placed in an encasing groove formed in a region extending from a first encasing layer through a second encasing layer to a nonmagnetic metal layer.
摘要:
The invention is directed to improvement of a write element of a thin film magnetic head. In the write element, a first coil and a second coil are provided on a first insulating film formed on one surface of a first magnetic film and surround in a spiral form a back gap portion. A second yoke portion in the upper position comprises a wide portion, a narrow portion and a sloping flare portion. The wide portion has a flat surface and is connected to the first magnetic film by a back gap portion at the rear of the medium-facing surface. The narrow portion forms the second pole portion and the surface of the narrow portion being at a lower position than the surface of the wide portion. The sloping flare portion extends from the narrow portion to the wide portion, gradually increasing in width and its surface sloping upward away from the surface of the narrow portion to the surface of the wide portion.
摘要:
A magnetic head includes a pole layer accommodated in a groove. The pole layer has a track width defining portion and a wide portion. The pole layer includes a plurality of magnetic films stacked. At least one of the plurality of magnetic films includes a first portion included in the track width defining portion, a second portion included in the wide portion, and a third portion coupling the first and second portions to each other. In a cross section passing through the center of the pole layer taken in the track width direction, the second portion is smaller than the first portion in thickness and the top surface of the third portion is inclined with respect to a direction perpendicular to a medium facing surface.
摘要:
A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.