公开(公告)号：US07205622B2

公开(公告)日：2007-04-17

申请号：US11038881

申请日：2005-01-20

申请人： Yousef M. Alimi ,  James R. Biard ,  Gilberto Morales

发明人： Yousef M. Alimi ,  James R. Biard ,  Gilberto Morales

IPC分类号： H01L29/82

CPC分类号： H01L43/065 ,  G01R33/077

摘要： A vertical Hall effect apparatus, including methods thereof. A substrate layer can be provided upon which an epitaxial layer is formed. The epitaxial layer is surrounded vertically by one or more isolation layers. Additionally, an oxide layer can be formed above the epitaxial layer. A plurality of Hall effect elements can be formed within the epitaxial layer(s) and below the oxide layer, wherein the Hall effect elements sense the components of an arbitrary magnetic field in the plane of the wafer and perpendicular to the current flow in the hall element. A plurality of field plates can be formed above the oxide layer to control the inherited offset due to geometry control and processing of the vertical Hall effect apparatus, while preventing the formation of an output voltage of the vertical Hall effect apparatus at zero magnetic fields thereof.

摘要翻译： 一种垂直霍尔效应装置，包括其方法。 可以提供形成外延层的衬底层。 外延层被一个或多个隔离层垂直包围。 另外，可以在外延层的上方形成氧化物层。 多个霍尔效应元件可以形成在外延层内并在氧化物层的下面，其中霍尔效应元件感测晶片平面中任意磁场的分量，并垂直于霍尔电流中的电流 元件。 可以在氧化物层上方形成多个场板，以控制由于垂直霍尔效应装置的几何形状控制和处理而导致的遗传偏移，同时防止垂直霍尔效应装置的输出电压在其零磁场下形成。

公开(公告)号：US08723507B2

公开(公告)日：2014-05-13

申请号：US13449149

申请日：2012-04-17

申请人： Richard Kirkpatrick ,  Yousef M. Alimi

发明人： Richard Kirkpatrick ,  Yousef M. Alimi

IPC分类号： G01R35/00

CPC分类号： G01R33/0035 ,  G01R33/07 ,  G01R33/09

摘要： An illustrative packaged magnetic field sensor includes a power input terminal and a sensor output terminal, both accessible from outside of the package housing. A sensing block is situated in the package housing and electrically coupled to the magnetic field sensing device and the sensor output terminal. An adjustment block is situated in the package housing and coupled to the power input terminal and the sensing block. In some cases, the adjustment block may receive one or more messages that include sensor adjustment information. The one or more messages may be modulated onto the power input signal. The adjustment block may decode the received sensor adjustment information from the messages, and store the decoded adjustment information into a memory. The adjustment block may then adjust the output signal of the sensing block based on the decoded adjustment information.

摘要翻译： 示例性的包装磁场传感器包括电力输入端子和传感器输出端子，两者都可从包装外壳的外部接近。 感测块位于封装壳体中并电耦合到磁场感测装置和传感器输出端子。 调节块位于封装壳体中并耦合到电源输入端子和感测块。 在一些情况下，调整块可以接收包括传感器调整信息的一个或多个消息。 一个或多个消息可以被调制到电源输入信号上。 调整块可以从消息中解码所接收的传感器调整信息，并将解码的调整信息存储到存储器中。 然后，调整块可以基于解码的调整信息来调整感测块的输出信号。

公开(公告)号：US20090108852A1

公开(公告)日：2009-04-30

申请号：US11977799

申请日：2007-10-26

申请人： Yousef M. Alimi ,  Richard A. Davis

发明人： Yousef M. Alimi ,  Richard A. Davis

IPC分类号： G01R27/26 ,  G01R3/00 ,  H01L21/62

CPC分类号： G01N27/223

摘要： An improved relative humidity sensor apparatus that provides a more accurate measurement of humidity in the presence of water condensation. A series capacitive sensor includes a thin porous platinum top plate, a humidity sensitive polyimide dielectric, and two metal bottom plates on a semiconductor substrate. The two capacitors can be wired in series such that the metal bottom plates form independent, electrically driven connections. The thin top layer can form a top plate. Changes in humidity affect the humidity sensitive dielectric thereby causing changes in the capacitive value. A P-well layer and a P-plus layer can be added at the perimeter of the substrate to create a path for a parasitic capacitance caused by water condensation to connect to one or more connection nodes, thereby preventing erroneous measurements of humidity in the presence of water condensation.

摘要翻译： 一种改进的相对湿度传感器装置，其在水凝结的存在下提供更准确的湿度测量。 串联电容传感器包括薄的多孔铂顶板，湿度敏感的聚酰亚胺电介质和半导体衬底上的两个金属底板。 两个电容器可以串联布线，使得金属底板形成独立的电驱动连接。 薄顶层可以形成顶板。 湿度变化会影响湿度敏感的电介质，从而引起电容值的变化。 可以在衬底的周边添加P阱层和P加层以产生由水冷凝引起的寄生电容的路径以连接到一个或多个连接节点，从而防止存在的湿度的错误测量 的水凝结。

公开(公告)号：US20130271124A1

公开(公告)日：2013-10-17

申请号：US13449149

申请日：2012-04-17

申请人： Richard Kirkpatrick ,  Yousef M. Alimi

发明人： Richard Kirkpatrick ,  Yousef M. Alimi

IPC分类号： G01R33/09 ,  G01R33/07 ,  G01R33/02

CPC分类号： G01R33/0035 ,  G01R33/07 ,  G01R33/09

摘要： An illustrative packaged magnetic field sensor includes a power input terminal and a sensor output terminal, both accessible from outside of the package housing. A sensing block is situated in the package housing and electrically coupled to the magnetic field sensing device and the sensor output terminal. An adjustment block is situated in the package housing and coupled to the power input terminal and the sensing block. In some cases, the adjustment block may receive one or more messages that include sensor adjustment information. The one or more messages may be modulated onto the power input signal. The adjustment block may decode the received sensor adjustment information from the messages, and store the decoded adjustment information into a memory. The adjustment block may then adjust the output signal of the sensing block based on the decoded adjustment information.

摘要翻译： 示例性的包装磁场传感器包括电力输入端子和传感器输出端子，两者都可从包装外壳的外部接近。 感测块位于封装壳体中并电耦合到磁场感测装置和传感器输出端子。 调节块位于封装壳体中并耦合到电源输入端子和感测块。 在一些情况下，调整块可以接收包括传感器调整信息的一个或多个消息。 一个或多个消息可以被调制到电源输入信号上。 调整块可以从消息中解码所接收的传感器调整信息，并将解码的调整信息存储到存储器中。 然后，调整块可以基于解码的调整信息来调整感测块的输出信号。

公开(公告)号：US07710128B2

公开(公告)日：2010-05-04

申请号：US11518649

申请日：2006-09-09

申请人： Yousef M. Alimi ,  Richard A. Davis

发明人： Yousef M. Alimi ,  Richard A. Davis

IPC分类号： G01R27/26

CPC分类号： G01N27/225

摘要： A humidity sensor apparatus and method of forming the same. A substrate can be provided upon which a plurality of humidity sensing components are disposed to form a humidity sensor thereof. Each humidity sensing component generally includes an associated particular parasitic capacitance. This parasitic capacitance is utilized to reduce and/or control a sensitivity and a total capacitance value associated with the humidity sensor without increasing a size of the humidity sensor and/or humidity sensor components (e.g., capacitors).

摘要翻译： 一种湿度传感器装置及其形成方法。 可以设置基板，在基板上设置多个湿度感测部件以形成其湿度传感器。 每个湿度感测组件通常包括相关联的特定寄生电容。 这种寄生电容用于在不增加湿度传感器和/或湿度传感器部件（例如电容器）的尺寸的情况下减少和/或控制与湿度传感器相关联的灵敏度和总电容值。

公开(公告)号：US07683636B2

公开(公告)日：2010-03-23

申请号：US11977799

申请日：2007-10-26

申请人： Yousef M. Alimi ,  Richard A. Davis

发明人： Yousef M. Alimi ,  Richard A. Davis

IPC分类号： G01R27/26 ,  H01G5/012

CPC分类号： G01N27/223

摘要： An improved relative humidity sensor apparatus that provides a more accurate measurement of humidity in the presence of water condensation. A series capacitive sensor includes a thin porous platinum top plate, a humidity sensitive polyimide dielectric, and two metal bottom plates on a semiconductor substrate. The two capacitors can be wired in series such that the metal bottom plates form independent, electrically driven connections. The thin top layer can form a top plate. Changes in humidity affect the humidity sensitive dielectric thereby causing changes in the capacitive value. A P-well layer and a P-plus layer can be added at the perimeter of the substrate to create a path for a parasitic capacitance caused by water condensation to connect to one or more connection nodes, thereby preventing erroneous measurements of humidity in the presence of water condensation.

摘要翻译： 一种改进的相对湿度传感器装置，其在水凝结的存在下提供更准确的湿度测量。 串联电容传感器包括薄的多孔铂顶板，湿度敏感的聚酰亚胺电介质和半导体衬底上的两个金属底板。 两个电容器可以串联布线，使得金属底板形成独立的电驱动连接。 薄顶层可以形成顶板。 湿度变化会影响湿度敏感的电介质，从而引起电容值的变化。 可以在衬底的周边添加P阱层和P加层以产生由水冷凝引起的寄生电容的路径以连接到一个或多个连接节点，从而防止存在的湿度的错误测量 的水凝结。

公开(公告)号：US20080061802A1

公开(公告)日：2008-03-13

申请号：US11518649

申请日：2006-09-09

申请人： Yousef M. Alimi ,  Richard A. Davis

发明人： Yousef M. Alimi ,  Richard A. Davis

IPC分类号： G01R27/26

CPC分类号： G01N27/225

摘要： A humidity sensor apparatus and method of forming the same. A substrate can be provided upon which a plurality of humidity sensing components are disposed to form a humidity sensor thereof. Each humidity sensing component generally includes an associated particular parasitic capacitance. This parasitic capacitance is utilized to reduce and/or control a sensitivity and a total capacitance value associated with the humidity sensor without increasing a size of the humidity sensor and/or humidity sensor components (e.g., capacitors).

摘要翻译： 一种湿度传感器装置及其形成方法。 可以设置基板，在基板上设置多个湿度感测部件以形成其湿度传感器。 每个湿度感测组件通常包括相关联的特定寄生电容。 这种寄生电容用于在不增加湿度传感器和/或湿度传感器部件（例如电容器）的尺寸的情况下减少和/或控制与湿度传感器相关联的灵敏度和总电容值。